Tokyo Electron FPF07P-AC100E超声波器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron FPF07P-AC100E 超声波器（Ultrasonic Transducer Unit） 是一款集成于 TEL 湿法清洗或显影设备中的关键清洗组件，主要用于通过超声波空化效应对晶圆表面进行非接触、高精度清洗。该型号适用于晶圆前道或中段工艺清洗处理，可显著提高颗粒去除率并提升良率。
一、产品基本信息
产品名称：超声波器 / 超声波清洗头
产品型号：FPF07P-AC100E
制造商：Tokyo Electron Ltd.（TEL）
工作电压：AC 100V（从型号推测）
适用位置：晶圆清洗腔体、显影槽、脱胶槽等模块内
二、核心功能
高效颗粒去除
通过高频振动在液体中形成微小空化气泡，清除晶圆表面的微粒、残胶、金属离子等污染物；
有效用于清除 0.1 μm 以下的微细颗粒。
非接触清洗
不对晶圆造成物理接触，适用于先进制程（FinFET、EUV）下对表面应力极其敏感的器件结构。
支持化学液清洗
可配合去离子水（DIW）、臭氧水、SC-1、SC-2、稀释氢氟酸等清洗液使用。
安全控制机制
集成温控、液位检测、功率保护等联动功能；
支持与主设备通讯，自动启停与报警反馈。
英文资料：
The Tokyo Electron FPF07P-AC100E Ultrasonic Transformer Unit is a key cleaning component integrated into TEL wet cleaning or developing equipment, mainly used for non-contact, high-precision cleaning of wafer surfaces through ultrasonic cavitation effect. This model is suitable for cleaning processes in the front or middle stages of wafers, which can significantly improve particle removal efficiency and yield.
1、 Basic Product Information
Product Name: Ultrasonic cleaner/Ultrasonic cleaning head
Product model: FPF07P-AC100E
Manufacturer: Tokyo Electron Ltd. (TEL)
Working voltage: AC 100V (inferred from the model)
Applicable location: in modules such as wafer cleaning chamber, developing tank, and delamination tank
2、 Core functions
Efficient particle removal
By high-frequency vibration, tiny cavitation bubbles are formed in the liquid to remove pollutants such as particles, residual glue, and metal ions from the wafer surface;
Effectively used for removing fine particles below 0.1 μ m.
Non contact cleaning
Not causing physical contact with the wafer, suitable for device structures that are extremely sensitive to surface stress in advanced processes (FinFET, EUV).
Support chemical solution cleaning
Can be combined with deionized water (DIW), ozone water SC-1、SC-2、 Dilute hydrofluoric acid and other cleaning solutions for use.
Security control mechanism
Integrated linkage functions such as temperature control, liquid level detection, and power protection;
Support communication with the main device, automatic start stop and alarm feedback.
2.产 品 展 示
3.其他产品
4.其他英文产品
RADISYS 451558-004 Communication Module
ABB UN0942b-P Programmable Controller
Teknic SST-1500-XCX Digital Servo Drive
| S32GNNA-HGNM-00 | SC452-815-05 | SC9020010104G108 |
| S32GNAA-RNVE-00 | SC453-040-08 | SC900-001-01 |
| S32GMNA-RNNM-00 | SC722A-001-PM72008 | SCE905-001-00 |
| S31HSNA-RNNM-03 | SC452-051-06 | SC902-001-01 |
| S31HNNA-RNNM-00 | SC724A-001-PM72012 | SCE905NN-001-01 |
