Tokyo Electron ES1D80-003817-15匹配器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron ES1D80-003817-15 匹配器（Matching Network） 是一款用于射频（RF）能量系统中的阻抗匹配模块，广泛应用于 TEL（Tokyo Electron）蚀刻或等离子体沉积等设备中，用于确保 RF 电源与工艺腔体之间实现最佳阻抗匹配，从而最大限度地提升能量传输效率并稳定等离子体特性。
一、产品基本信息
产品名称：匹配器（Matching Network）
产品型号：ES1D80-003817-15
设备归属：Tokyo Electron 半导体制造设备（通常属于 D80 或 D80 系列的子模块）
二、核心功能
自动阻抗匹配
实时监测工艺腔体阻抗变化，自动调整匹配电感/电容；
将 RF 电源输出阻抗（通常为 50Ω）与工艺负载精确匹配；
保证最小反射功率，最大限度提高 RF 能量的有效利用率。
等离子体工艺稳定性保障
保持稳定的射频功率传输，有助于稳定等离子体密度与均匀性；
适应不同工艺气体或反应条件下的阻抗变化。
射频系统保护
防止因阻抗不匹配产生的反射功率损害 RF 电源；
提升设备寿命和运行安全性。
英文资料：
The Tokyo Electron ES1D80-003817-15 Matching Network is an impedance matching module used in radio frequency (RF) energy systems. It is widely used in TEL (Tokyo Electron) etching or plasma deposition equipment to ensure optimal impedance matching between the RF power supply and the process chamber, thereby maximizing energy transfer efficiency and stabilizing plasma characteristics.
1、 Basic Product Information
Product Name: Matching Network
Product model: ES1D80-003817-15
Equipment ownership: Tokyo Electron semiconductor manufacturing equipment (usually sub modules belonging to D80 or D80 series)
2、 Core functions
Automatic impedance matching
Real time monitoring of impedance changes in the process chamber, automatic adjustment of matching inductance/capacitance;
Accurately match the output impedance of the RF power supply (usually 50 Ω) with the process load;
Ensure minimum reflected power and maximize the effective utilization of RF energy.
Stability guarantee of plasma process
Maintaining stable RF power transmission helps to stabilize plasma density and uniformity;
Adapt to impedance changes under different process gases or reaction conditions.
RF system protection
Prevent RF power supply from being damaged by reflected power caused by impedance mismatch;
Improve equipment lifespan and operational safety.
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-11415 Digital Input Module
GE D20 EME 10BASE-T Digital Control Modu
RADISYS 451558-004 Communication Module
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