Tokyo Electron 2L39-000048-54发电机 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron 2L39-000048-54 发电机 是一款用于半导体制造设备辅助电源供应的关键部件，主要功能是为设备内部提供稳定的交流或直流电力，保障工艺系统持续、可靠运行。该发电机通常集成于大型 TEL 设备的电源管理子系统中，确保设备在电力波动或外部断电情况下维持关键控制与工艺运行。
一、产品功能定位
类型：辅助电源发电机 / 备用电源模块
主要功能：
提供稳定、持续的电力输出支持设备运行；
防止因外部电源中断导致的工艺中断或设备损坏；
可能与不间断电源（UPS）系统或电池组配合使用。
二、主要应用领域
1. 半导体制造设备电源保障
支持蚀刻、沉积、光刻等设备关键模块的电力供应；
保障设备在电网波动或短时断电情况下平稳运行。
2. 工厂自动化系统
作为生产线关键设备的备用电源；
维护数据完整性与工艺参数连续性。
英文资料：
The Tokyo Electron 2L39-000048-54 generator is a key component used for auxiliary power supply in semiconductor manufacturing equipment. Its main function is to provide stable AC or DC power for the internal of the equipment, ensuring the continuous and reliable operation of the process system. This generator is typically integrated into the power management subsystem of large TEL equipment to ensure critical control and process operation in the event of power fluctuations or external power outages.
1、 Product functional positioning
Type: Auxiliary Power Generator/Backup Power Module
Main functions:
Provide stable and continuous power output to support equipment operation;
Prevent process interruption or equipment damage caused by external power interruption;
May be used in conjunction with uninterruptible power supply (UPS) systems or battery packs.
2、 Main application areas
1. Power supply guarantee for semiconductor manufacturing equipment
Support power supply for key modules of equipment such as etching, deposition, and photolithography;
Ensure the smooth operation of equipment in the event of power grid fluctuations or short-term power outages.
2. Factory automation system
As a backup power source for key equipment on the production line;
Maintain data integrity and process parameter continuity.
2.产 品 展 示
3.其他产品
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