Tokyo Electron 3Z80-000604-11控制器盒 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron 3Z80-000604-11 控制器盒（Controller Enclosure/Box） 是 TEL 半导体设备中用于安装和保护控制模块及其相关电子组件的机箱或外壳单元。它不仅为控制器模块提供机械保护，还负责散热、防尘和电磁屏蔽，确保控制系统稳定可靠运行。
一、产品功能定位
类型：控制器模块外壳 / 机箱
主要功能：
保护内部控制器电路板及电子元件免受外部机械损伤、灰尘和污染；
具备散热结构，辅助控制器温度管理，避免过热；
支持控制模块的安装固定和连接接口布置；
提供电磁干扰（EMI）屏蔽，保障信号稳定。
二、应用领域
半导体制造设备中的控制系统保护
蚀刻设备、沉积设备等关键工艺设备中的控制器安装盒；
确保控制模块在洁净室和工业环境下的安全与稳定工作。
控制模块维护与更换支持
便于快速拆装，支持设备维修和模块替换；
结构设计符合 TEL 标准模块化规范。
英文资料：
The Tokyo Electron 3Z80-000604-11 Controller Enclosure/Box is a chassis or enclosure unit used in TEL semiconductor equipment to install and protect control modules and their related electronic components. It not only provides mechanical protection for the controller module, but also is responsible for heat dissipation, dust prevention, and electromagnetic shielding to ensure stable and reliable operation of the control system.
1、 Product functional positioning
Type: Controller Module Shell/Chassis
Main functions:
Protect the internal controller circuit board and electronic components from external mechanical damage, dust, and pollution;
Equipped with a heat dissipation structure to assist in temperature management of the controller and prevent overheating;
Support the installation, fixation, and layout of connection interfaces for control modules;
Provide electromagnetic interference (EMI) shielding to ensure signal stability.
2、 Application Fields
Control System Protection in Semiconductor Manufacturing Equipment
Controller installation box in key process equipment such as etching equipment and deposition equipment;
Ensure the safe and stable operation of control modules in clean rooms and industrial environments.
Maintenance and replacement support for control modules
Easy to disassemble and assemble quickly, supporting equipment maintenance and module replacement;
The structural design complies with the TEL modular specification.
2.产 品 展 示
3.其他产品
Intelligent Instrumentation TM2500-001B 终端操作面板
4.其他英文产品
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ASEA 2668 184-447 Communication Module
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