Tokyo Electron HTE-0V5-B-11电路板组件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron HTE-0V5-B-11 电路板组件 是 TEL 半导体制造设备中的专用电子模块，通常作为控制、信号处理或接口功能的关键部件。该电路板组件集成了多种电子元件，支持设备内部工艺控制、数据传输和系统协调工作。
一、产品功能定位
类型：电子控制/接口电路板组件
主要功能：
实现设备内信号的接收、处理与输出；
支持与主控系统的数据通信与指令响应；
作为系统模块的电气连接桥梁，兼具电源管理与信号整合。
二、典型应用领域
半导体工艺设备控制
用于气体流量调节、温度监控、压力控制等子系统；
参与设备运行逻辑与状态反馈管理。
数据采集与接口转换
支持模拟量和数字量信号的转换与采集；
提供不同通信协议接口，便于系统集成。
信号隔离与滤波
防止电磁干扰，保障信号稳定性；
增强设备抗干扰能力和运行可靠性。
三、适用设备示例
| TEL 设备系列 | 应用模块 |
|---|---|
| TEL Unity / Trias 系列 | 腔体控制子系统、电源管理模块 |
| TEL Clean Track 系列 | 显影、清洗、烘干模块的电子控制单元 |
| TEL Indy / Tactra 系列 | 传感器接口与数据处理模块 |
英文资料：
The Tokyo Electron HTE-0V5-B-11 circuit board component is a specialized electronic module in TEL semiconductor manufacturing equipment, typically used as a key component for control, signal processing, or interface functions. This circuit board component integrates multiple electronic components, supporting internal process control, data transmission, and system coordination within the device.
1、 Product functional positioning
Type: Electronic Control/Interface Circuit Board Component
Main functions:
Realize the reception, processing, and output of signals within the device;
Support data communication and command response with the main control system;
As an electrical connection bridge for system modules, it combines power management and signal integration.
2、 Typical application areas
Semiconductor process equipment control
Used for gas flow regulation, temperature monitoring, pressure control and other subsystems;
Participate in the management of device operation logic and status feedback.
Data collection and interface conversion
Support the conversion and acquisition of analog and digital signals;
Provide different communication protocol interfaces for system integration.
Signal isolation and filtering
Prevent electromagnetic interference and ensure signal stability;
Enhance the anti-interference capability and operational reliability of the equipment.
3、 Examples of Applicable Devices
TEL device series application module
TEL Unity/Trias series cavity control subsystem, power management module
Electronic control unit for TEL Clean Track series developing, cleaning, and drying modules
TEL Indy/Tactra series sensor interface and data processing module
2.产 品 展 示
3.其他产品
Intelligent Instrumentation TM2500-001B 终端操作面板
4.其他英文产品
IC3600EPSS1B power supply boar
| SR3640-8293-7-56HC | AMAT 0100-00109 | PFCL 201CE-50.0KN |
| SR3640-8293-7-13-48BC | AMAT 0100-00941 | 57310001-KN/2 DSTC175 ABB |
| SR3640-8063-7-56HC | AMAT 0100-00046 | 57310255-AV DSRF180A ABB |
| SR3640-773-48C | 531X302DCIBAG1 | 57310001-CX DSPC155 ABB |
| SR3640-771-7-48C | 531X302DCIAPG2 | IC3600SVSA1D |
| SR3640-4370-56C | 531X308PCSAAG1 | IC3600SVSA1C |
