Tokyo Electron 3181-060021-14印刷电路板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Tokyo Electron 3181-060021-14 印刷电路板(Printed Circuit Board, PCB) 是一款用于半导体制造设备内部的电子控制模块的核心组件,具有信号处理、电源分配、接口连接等多种功能,通常为 TEL(Tokyo Electron)定制化控制系统中的专用板卡之一。
一、产品功能概述
类型:多层印刷电路板
作用:
承载电子元器件,实现控制、信号采集、数据通信等功能;
提供设备模块间的电信号传输与逻辑控制;
作为特定功能模块的控制逻辑核心。
二、主要应用领域
半导体设备控制系统
用于主控系统中,作为特定功能的执行或采集单元,例如温度控制、传感器采集、气体阀控制等;
参与设备运行流程中的各类输入/输出处理。
腔体子系统控制
部署于真空腔体、加热模块、冷却模块、电源模块等内部,用于实时信号监控与调节。
图像识别或位置反馈子系统
支持图像采集卡、CCD 控制板、位置反馈电路等功能模块的数据处理。
通信与接口转换
实现不同通信协议(如RS-232、I²C、CAN)的转换,或作为TEL平台设备的子系统桥接板。
英文资料:
The Tokyo Electron 3181-060021-14 Printed Circuit Board (PCB) is a core component used for electronic control modules inside semiconductor manufacturing equipment. It has multiple functions such as signal processing, power distribution, and interface connection, and is usually one of the specialized boards in TEL (Tokyo Electron) customized control systems.
1、 Product Function Overview
Type: Multilayer Printed Circuit Board
effect:
Carrying electronic components to achieve functions such as control, signal acquisition, and data communication;
Provide electrical signal transmission and logic control between device modules;
As the control logic core of a specific functional module.
2、 Main application areas
Semiconductor equipment control system
Used in the main control system as an execution or acquisition unit for specific functions, such as temperature control, sensor acquisition, gas valve control, etc;
Participate in various input/output processing in the device operation process.
Control of cavity subsystem
Deploy inside vacuum chambers, heating modules, cooling modules, power modules, etc., for real-time signal monitoring and adjustment.
Image recognition or position feedback subsystem
Support data processing for functional modules such as image acquisition cards, CCD control boards, and position feedback circuits.
Communication and Interface Conversion
Implement the conversion of different communication protocols (such as RS-232, I ² C, CAN), or serve as a subsystem bridge board for TEL platform devices.
2.产 品 展 示
3.其他产品
ABB PHARPS32000000 F8G2B3B6 电源模块
GE 516TX 336A4940DNP516TX 输入输出模块
4.其他英文产品
ABB P8480 Analog Output Module
Radisys EPC-3307 processor board
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