Tokyo Electron 3M81-019772-11控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron (TEL) 3M81-019772-11 控制器模块 — 产品应用领域详解
一、产品功能定位
3M81-019772-11 控制器模块是 Tokyo Electron 半导体设备中的核心控制单元，负责设备的逻辑控制、数据处理及协调各子系统的运行。该模块作为控制系统的大脑，执行程序指令，处理传感器数据，输出控制信号，保障设备自动化和精确运行。
二、主要应用领域
1. 半导体制造设备主控制系统
典型设备：
等离子刻蚀机（Etcher）
化学气相沉积设备（CVD）
薄膜沉积系统（ALD、PVD）
晶圆清洗及显影设备
功能职责：
实时控制工艺参数（温度、压力、气体流量、功率等）；
管理设备状态，协调各控制单元、传感器、执行机构的工作；
运行工艺程序，保障工艺流程稳定、可重复。
2. 设备自动化与闭环控制核心
数据采集与反馈处理：采集各类模拟和数字信号，进行数据分析与反馈调整，实现闭环控制。
与子模块协作：协调射频模块、电源模块、真空系统、温控系统等，实现整体设备同步。
异常检测与安全保护：监控设备运行异常，触发报警及保护动作，保障设备安全。
英文资料：
Tokyo Electron (TEL) 3M81-019772-11 Controller Module - Product Application Field Detailed Explanation
1、 Product functional positioning
The 3M81-019772-11 controller module is the core control unit in Tokyo Electron semiconductor equipment, responsible for logical control, data processing, and coordinating the operation of various subsystems of the equipment. This module serves as the brain of the control system, executing program instructions, processing sensor data, outputting control signals, and ensuring equipment automation and precise operation.
2、 Main application areas
1. Main control system for semiconductor manufacturing equipment
Typical equipment:
Plasma Etcher
Chemical Vapor Deposition Equipment (CVD)
Thin film deposition systems (ALD, PVD)
Wafer cleaning and developing equipment
Functional responsibilities:
Real time control of process parameters (temperature, pressure, gas flow rate, power, etc.);
Manage equipment status, coordinate the work of various control units, sensors, and actuators;
Run the process program to ensure the stability and repeatability of the process flow.
2. Equipment automation and closed-loop control core
Data collection and feedback processing: Collect various analog and digital signals, perform data analysis and feedback adjustment, and achieve closed-loop control.
Collaboration with sub modules: Coordinate RF modules, power modules, vacuum systems, temperature control systems, etc. to achieve overall equipment synchronization.
Abnormal detection and security protection: Monitor equipment for abnormal operation, trigger alarms and protective actions to ensure equipment safety.
2.产 品 展 示
3.其他产品
4.其他英文产品
PROSOFT MVI46-MCM communicatio
Kollmorgen S72402-NANANA servo amplifier
ASEA 57360001-HG Circuit Board
| 339-E-P5-G5-L-E-S-N-N-SN-N-N | 3050-PIF-3 | IC3600VANA1D |
| 339-E-P5-G5-H-R-S-N-N-1E-D-N | 3050-EGW2 | IC3600VANA1 |
| 339-E-P5-G5-H-E-S-N-N-SN-D-N | 3050-EGW1 | IC3600TSUJ1B |
| 339-E-P5-G5-H-E-S-N-N-1E-D-H | 8010-SSK-374 | IC3600TSUJ1A |
| 339-E-P1-G1-H-E-S-N-P-3E-D-N | 8010-SPR-300 | IC3600TSUJ1 |
| 339-E-P1-G1-H-E-S-N-P-1E-D-N | 8010-SPR-250 | IC3600TSUD1B |
| 339-E-P1-G1-H-E-S-N-N-SN-D-N | 8010-SPR-200 | IC3600TSUD1 |
