Tokyo Electron BX80-000062-V1控制器机架 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron (TEL) BX80-000062-V1 控制器机架 — 产品应用领域详解
1. 半导体制造设备中的主控框架
核心作用：BX80-000062-V1 控制器机架是安装和集成多块控制模块、电源单元、通信接口板等核心组件的机械与电气平台。
主要任务：统一承载和管理设备控制系统所需的各类控制板卡和模块，形成系统级控制架构。
应用设备：广泛用于光刻机、刻蚀机、涂胶显影机、CVD 等关键半导体生产设备。
2. 控制系统模块化部署平台
模块安装：支持多插槽结构，可灵活配置 CPU 板、I/O 控制板、通讯板等。
便于维护：模块化设计方便快速更换故障组件，提升设备可维护性和稼动率。
扩展性强：根据工艺或控制需求可添加/移除控制单元，适应不同产品线。
3. 系统通信与电源集中管理
通信整合：机架内部布设通信总线，为控制器各模块之间提供统一高速数据通道（如VME、PCIe或专有总线）。
电源分配：集成统一的电源接口和分配结构，为每个模块提供稳定电源，降低布线复杂度。
英文资料：
Tokyo Electron (TEL) BX80-000062-V1 Controller Rack - Detailed Explanation of Product Application Fields
1. Main control framework in semiconductor manufacturing equipment
Core function: The BX80-000062-V1 controller rack is a mechanical and electrical platform for installing and integrating multiple control modules, power units, communication interface boards, and other core components.
Main task: Unify and manage various control boards and modules required for equipment control systems, forming a system level control architecture.
Application equipment: Widely used in key semiconductor production equipment such as lithography machines, etching machines, coating and developing machines, CVD, etc.
2. Modular deployment platform for control system
Module installation: Supports multi slot structure, allowing flexible configuration of CPU board, I/O control board, communication board, etc.
Easy to maintain: Modular design facilitates quick replacement of faulty components, improving equipment maintainability and utilization rate.
Strong scalability: Control units can be added/removed according to process or control requirements to adapt to different product lines.
3. System communication and centralized power management
Communication integration: Communication buses are installed inside the rack to provide a unified high-speed data channel (such as VME, PCIe, or proprietary buses) between various modules of the controller.
Power distribution: Integrating a unified power interface and distribution structure to provide stable power for each module and reduce wiring complexity.
2.产 品 展 示
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