Tokyo Electron 3M81-024340-14驱动器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-024340-14 驱动器模块
（Driver Module）
产品功能简介：
3M81-024340-14 驱动器模块 是 Tokyo Electron（TEL）半导体设备中用于驱动电机、执行器或其他负载的关键模块。它主要承担电力输出与控制逻辑执行的双重作用，在设备自动化系统中属于动作执行层的核心部件。
主要功能包括：
为步进电机、伺服电机或其他电动执行单元提供驱动电流与控制脉冲
接收来自控制器（如 PLC 或主控板）的信号，执行启停、转速、方向控制
实现高精度定位控制，支持加减速曲线与回零逻辑
内置过流、过压、过温保护，保障设备稳定运行
与运动控制系统或 I/O 系统协同实现自动化工艺流程
主要应用领域：
1. 晶圆搬运与对位系统
驱动晶圆搬运手臂、升降机构、旋转台等关键部件
保证晶圆在不同模块（如 EFEM、Load Port、腔体）之间的准确传输和定位
2. 精密运动控制系统
在 TEL Etcher、CVD、PVD 等设备中，驱动气缸、导轨、电动滑台实现流程动作
用于载盘机构、装载机构、门控机构的自动驱动控制
3. 真空与气体控制设备
控制真空阀门的启闭动作
驱动压力调节单元中的微电机或线性执行器
英文资料：
TEL Tokyo Electron 3M81-024340-14 Driver Module
（Driver Module）
Product Function Introduction:
The 3M81-024340-14 driver module is a critical module used in Tokyo Electron (TEL) semiconductor equipment to drive motors, actuators, or other loads. It mainly plays a dual role in power output and control logic execution, and is a core component of the action execution layer in equipment automation systems.
The main functions include:
Provide driving current and control pulses for stepper motors, servo motors, or other electric execution units
Receive signals from controllers (such as PLCs or main control boards) to perform start stop, speed, and direction control
Realize high-precision positioning control, support acceleration and deceleration curves and zero return logic
Built in overcurrent, overvoltage, and overtemperature protection to ensure stable operation of the equipment
Collaborate with motion control systems or I/O systems to achieve automated process flow
Main application areas:
1. Wafer handling and alignment system
Drive key components such as wafer handling arms, lifting mechanisms, and rotating tables
Ensure accurate transfer and positioning of wafers between different modules (such as EFEM, load ports, chambers)
2. Precision motion control system
In TEL Etcher, CVD, PVD and other equipment, the driving cylinder, guide rail, and electric slide table are used to achieve process actions
Automatic drive control for loading mechanisms, loading mechanisms, and door control mechanisms
3. Vacuum and gas control equipment
Control the opening and closing action of the vacuum valve
Micro motors or linear actuators in the driving pressure regulating unit
2.产 品 展 示
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| 710-302407-00 | 03-10484-00 | F31X118CCAACG1 |
| 70-28255-01 | 03-290206-00 | 700-733242-001 |
| 700-661726-00 | 02-00072-00 | 710-450320-00 |
| 700-659846-00 | 531X111PSHANG3 | F31X133PRUALG1 |
| 700-212470-000 | 331X232ACG | 0033799-000 |
| 6RY1703-0DA02 | 531X111PSHAMG3 | F31X135PRGBEG1 |
