Tokyo Electron 381-600090-1印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-600090-1 印刷电路板
（Printed Circuit Board）
产品概述：
该 PCB 是 Tokyo Electron（TEL）半导体设备中的专用功能电路板，用于设备内部的信号传输、控制逻辑实现与系统接口扩展。作为一款中枢性电子部件，它通常承担以下角色：
驱动信号处理与分配
执行设备子系统控制逻辑
管理传感器输入、执行机构输出
与主控系统或上位板卡通信
功能特性：
集成数字与模拟电路，支持多种信号类型
具备多通道输入输出（I/O）功能
电路中可能包含处理器、驱动芯片、隔离电路和状态指示元件
与其他 PCB 通过背板或连接器组网协作
支持模块热插拔与维护替换
主要应用领域：
1. 设备控制与子系统联动
用于控制 TEL 设备中的子功能模块，如：
晶圆搬运系统（Load Port、Transfer Arm）
真空泵与阀门控制
对位平台或工艺腔体辅助设备
2. 信号路由与采集处理
采集传感器信号（温度、气压、位置等）
向执行器（电磁阀、电机、加热元件）输出控制信号
3. 工艺参数监测与数据采集
实现关键参数（如加热温度、真空状态）监控与反馈
与主控系统协同执行闭环控制策略
英文资料：
TEL Tokyo Electron 381-600090-1 Printed Circuit Board
（Printed Circuit Board）
Product Overview:
This PCB is a specialized functional circuit board in Tokyo Electron (TEL) semiconductor equipment, used for internal signal transmission, control logic implementation, and system interface expansion. As a central electronic component, it typically plays the following roles:
Drive signal processing and allocation
Execute device subsystem control logic
Manage sensor inputs and actuator outputs
Communicate with the main control system or upper board
Functional features:
Integrated digital and analog circuits, supporting multiple signal types
Capable of multi-channel input/output (I/O) function
The circuit may contain processors, driver chips, isolation circuits, and status indicator components
Collaborate with other PCBs through backplane or connector networking
Support module hot plugging and maintenance replacement
Main application areas:
1. Equipment control and subsystem linkage
Used to control sub functional modules in TEL devices, such as:
Wafer Handling System (Load Port, Transfer Arm)
Vacuum pump and valve control
Alignment platform or process chamber auxiliary equipment
2. Signal routing and acquisition processing
Collect sensor signals (temperature, air pressure, position, etc.)
Output control signals to actuators (solenoid valves, motors, heating elements)
3. Process parameter monitoring and data collection
Implement monitoring and feedback of key parameters such as heating temperature and vacuum status
Collaborate with the main control system to execute closed-loop control strategies
2.产 品 展 示
3.其他产品
IS400JPDHG1ABB IS410JPDHG1A轴速度反馈传感器
4.其他英文产品
Asea EB0524B01 driver input power board
ABB UN1024c-P Remote Terminal Module
| 710-657231-20 | 8005-DMU-1 | 820-22196-002 |
| 710-657068-20 | 8005-CP-50 | 710-659603-20 |
| 710-657058-20 | 8005-CP-51 | 073-653015-00 |
| 710-655651-20 | 8005-CB-60 | 710-650099-20 |
| 710-653699-20 | 8005-AN-108 | 710-809156-000 |
| 710-652697-20 | 8055-SCP-655X | 710-678525-00 |
| 710-652010-20 | 8055-SCP-655R | 531X310SNDAEG1 |
