Tokyo Electron 1181-000571-13控制PCB卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：
TEL Tokyo Electron 1181-000571-13 控制 PCB 卡
（Control PCB Card）
产品定义与功能：
该控制 PCB 卡是 TEL（Tokyo Electron）设备中的核心电子控制部件之一，作为子系统或设备单元的本地控制核心，具备以下功能：
执行特定子模块（如搬运系统、真空控制、加热单元等）的控制逻辑
处理来自主控系统或传感器的输入信号，并输出控制指令
实现设备状态监控、动作指令执行、报警联锁等功能
通常集成多种通信接口和 I/O 端口，支持设备内部模块化互联
可能包含嵌入式控制器、驱动芯片、数据缓冲与安全保护电路
主要应用领域：
1. 晶圆处理模块控制
控制晶圆传输臂、对位平台、升降机构等运动部件
接收来自上位控制系统的动作序列指令，并实现本地逻辑处理
2. 真空与气体处理系统
用于管理腔体内的真空泵、阀门、气体流量控制器（MFC）等组件
对环境压力、气体比例等进行闭环控制
3. 本地设备状态监测与保护
实时采集温度、电流、电压、位置、门锁等信号状态
触发设备安全保护动作，如断电、急停、联锁响应
4. 模块化控制系统集成
在大型系统中作为分布式控制单元（Distributed Control Unit, DCU）工作
与主控板（Main Controller）通过串口或总线方式通讯协同运行
英文资料：
Product Name:
TEL Tokyo Electron 1181-000571-13 Control PCB Card
（Control PCB Card）
Product definition and functionality:
This control PCB card is one of the core electronic control components in TEL (Tokyo Electron) equipment, serving as the local control core for subsystems or equipment units, and has the following functions:
Execute control logic for specific submodules (such as handling systems, vacuum control, heating units, etc.)
Process input signals from the main control system or sensors and output control commands
Implement functions such as equipment status monitoring, action command execution, alarm interlocking, etc
Usually integrated with multiple communication interfaces and I/O ports, supporting modular interconnection within devices
May include embedded controllers, driver chips, data buffering, and security protection circuits
Main application areas:
1. Control of wafer processing module
Control moving parts such as wafer transfer arm, alignment platform, lifting mechanism, etc
Receive action sequence instructions from the upper control system and implement local logic processing
2. Vacuum and gas processing systems
Used to manage components such as vacuum pumps, valves, and gas flow controllers (MFCs) inside the chamber
Closed loop control of environmental pressure, gas ratio, etc
3. Local device status monitoring and protection
Real time collection of temperature, current, voltage, position, door lock and other signal status
Trigger device safety protection actions, such as power outage, emergency stop, interlock response
4. Modular control system integration
Working as a Distributed Control Unit (DCU) in large-scale systems
Collaborate with the Main Controller through serial or bus communication to operate in synergy
2.产 品 展 示
3.其他产品
4.其他英文产品
RADISYS 61-0158-04 CPU Control Card
ASEA DSQC100 connector backplane
ABB UN0821B-P redundant output module
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| 720-23743-000 | 8030-ROM-131 | X-HART 32 01 |
| 720-23475-001 | 8030-ROM-122 | X-AO 16 51 |
| 720-23461-000 | CACR-SR20BB1AM | X-AO 16 01 |
| 720-21901-003 | 6SC6103-0SG31 | X-DO 12 51 |
| 712-404056-00 | 6SC9811-4BF10 | X-DO 12 02 |
