Tokyo Electron 3D81-000063-V5电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000063-V5 电路板
（Printed Circuit Board）
产品功能简介：
该电路板是 Tokyo Electron（TEL）半导体制造设备中的一款专用功能板，承担设备内部关键的信号处理、逻辑控制和接口连接任务。其功能特点可能包括：
控制系统子模块之间的信号传输与接口管理
连接传感器、驱动器、执行机构，实现自动控制
对来自主控制器或 PLC 的指令进行分配、执行
支持设备状态反馈与运行参数采集
主要应用领域：
1. 设备控制系统内部核心部件
用于设备的主控系统或子系统内，协调执行机构、I/O 模块与主控器之间的信号交互
实现动作流程的逻辑控制，例如腔体开合、晶圆移动、真空控制等
2. 晶圆搬运与定位模块
管理与电机控制、电磁阀、传感器等组件的连接
确保晶圆搬运过程中的精度和可靠性
3. 真空处理系统
可能用于真空腔体内气体控制、压力监测或阀门驱动等子系统中
适配质量流量控制器（MFC）、真空传感器等设备
4. 人机界面与通信连接
担任人机交互面板与主系统间的数据传递媒介
可能包含通信接口（如 RS232、CAN、Ethernet）用于远程监控或系统集成
英文资料：
TEL Tokyo Electron 3D81-000063-V5 Circuit Board
（Printed Circuit Board）
Product Function Introduction:
This circuit board is a specialized functional board in Tokyo Electron (TEL) semiconductor manufacturing equipment, responsible for critical signal processing, logic control, and interface connection tasks within the equipment. Its functional features may include:
Signal transmission and interface management between control system submodules
Connect sensors, drivers, and actuators to achieve automatic control
Allocate and execute instructions from the main controller or PLC
Support device status feedback and operation parameter collection
Main application areas:
1. Core components inside the equipment control system
Used within the main control system or subsystem of a device to coordinate signal interaction between the executing mechanism, I/O modules, and the main controller
Implement logical control of action processes, such as chamber opening and closing, wafer movement, vacuum control, etc
2. Wafer handling and positioning module
Manage the connection of components such as motor control, solenoid valves, sensors, etc
Ensure accuracy and reliability during wafer handling
3. Vacuum processing system
May be used in subsystems such as gas control, pressure monitoring, or valve actuation within vacuum chambers
Adapt to devices such as Mass Flow Controllers (MFCs) and vacuum sensors
4. Human machine interface and communication connection
Serve as the data transmission medium between the human-computer interaction panel and the main system
May include communication interfaces (such as RS232, CAN, Ethernet) for remote monitoring or system integration
2.产 品 展 示
3.其他产品
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