Tokyo Electron 3M81-024341-12印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-024341-12 印刷电路板
（Printed Circuit Board）
产品功能概述：
该PCB板是Tokyo Electron半导体设备中的关键电子组件，通常用于：
支持设备内部控制信号传输
连接传感器、执行器和主控模块
实现电路间的数据与电源分配
保障设备控制逻辑和信号完整性
主要应用领域：
半导体制造设备内部控制
用于蚀刻机（Etcher）、沉积设备（CVD/PVD）等设备中的控制与信号处理。
I/O接口与信号分配
作为输入输出信号的连接平台，管理多个传感器和驱动信号。
机械动作控制
支持晶圆搬运系统中电机和执行机构的信号控制与反馈。
设备状态监测
传递温度、压力、位置等传感器信号，实现过程监控。
典型设备：
Tokyo Electron 蚀刻机
化学气相沉积设备
晶圆传输与搬运系统
英文资料：
TEL Tokyo Electron 3M81-024341-12 Printed Circuit Board
（Printed Circuit Board）
Product Function Overview:
This PCB board is a critical electronic component in Tokyo Electron semiconductor equipment, typically used for:
Support internal control signal transmission of devices
Connect sensors, actuators, and main control modules
Realize data and power distribution between circuits
Ensure the integrity of equipment control logic and signals
Main application areas:
Internal Control of Semiconductor Manufacturing Equipment
Used for control and signal processing in etching machines (Etcher), deposition equipment (CVD/PVD), and other devices.
I/O interface and signal allocation
As a connection platform for input and output signals, it manages multiple sensors and drive signals.
Mechanical motion control
Support signal control and feedback for motors and actuators in wafer handling systems.
Equipment status monitoring
Transmit sensor signals such as temperature, pressure, and position to achieve process monitoring.
Typical equipment:
Tokyo Electron Etching Machine
Chemical vapor deposition equipment
Wafer Transfer and Handling System
2.产 品 展 示
3.其他产品
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