Tokyo Electron 2L39-000009-21控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2L39-000009-21 控制器模块
（Controller Module）
产品功能：
该模块是 Tokyo Electron 半导体设备中的关键控制单元之一，负责设备运行过程中的核心逻辑控制、动作协调和数据通讯，主要具备以下功能：
控制设备内多个子系统的动作逻辑与流程顺序
采集传感器反馈信号并进行逻辑判断与响应
向执行器（如电机、阀门、加热单元等）发出控制指令
与上位机或主控制系统进行通信，实现数据交互与任务分配
执行预设程序或自动化流程，确保设备高效运行
主要应用领域：
1. 晶圆处理系统核心控制
控制晶圆转运、对位、升降、旋转等精密动作流程
管理各部位机械手（robot arm）和滑台等设备的运动逻辑
2. 真空腔体操作控制
控制真空泵、气体阀、腔体加热模块的运行状态
实现真空压力的闭环调节与安全联锁保护
3. 流程管理与顺序逻辑控制
执行复杂的加工步骤流程，如蚀刻、沉积、清洗等多阶段工艺控制
支持设定流程中断、自动复位、故障响应等功能
4. 设备通信与人机界面集成
与触摸屏、上位机、MES系统通信，进行数据上传/下载
支持远程监控、日志记录、参数配置等高级操作
英文资料：
TEL Tokyo Electron 2L39-000009-21 Controller Module
（Controller Module）
Product Features:
This module is one of the key control units in Tokyo Electron semiconductor equipment, responsible for core logic control, action coordination, and data communication during equipment operation. It mainly has the following functions:
Control the action logic and process sequence of multiple subsystems within the device
Collect sensor feedback signals and make logical judgments and responses
Send control commands to actuators (such as motors, valves, heating units, etc.)
Communicate with the upper computer or main control system to achieve data exchange and task allocation
Execute preset programs or automated processes to ensure efficient operation of equipment
Main application areas:
1. Core control of wafer processing system
Control the precision action process of wafer transfer, alignment, lifting, rotation, etc
Manage the motion logic of various parts such as robot arms and slide tables
2. Vacuum chamber operation control
Control the operation status of vacuum pump, gas valve, and chamber heating module
Realize closed-loop regulation of vacuum pressure and safety interlock protection
3. Process management and sequential logic control
Execute complex processing steps such as etching, deposition, cleaning, and other multi-stage process controls
Support setting process interruption, automatic reset, fault response and other functions
4. Device communication and human-machine interface integration
Communicate with touch screen, upper computer, MES system to upload/download data
Support advanced operations such as remote monitoring, logging, parameter configuration, etc
2.产 品 展 示
3.其他产品
4.其他英文产品
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ASEA ES1530b module card board
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| 874E136G1 | GESPAC 22-0075-008 | 48980001-FK DSSR116 ABB |
| 874E136-G06 | GESPAC GESBUS-8M | 48980001-NK DSSR122 ABB |
| 874E136-G01 | ,CACR-UP50AABY45 | PFEA11165 |
| 850-EP5NNS5HNNAANGAPCCSENNBN | AMAT 0100-90243 | PFEA 112, IP 20 |
| 850-EP5NNS5HNNAANGAPCB2ESNBN | AMAT 0100-76290 | 21660559-H DSRA110 ABB |
