Tokyo Electron 3M81-024341-14终端模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-024341-14 终端模块
（Terminal Module）
产品类型与作用：
该模块属于 Tokyo Electron 半导体设备系统中的电气连接终端单元，用于多路信号或电源线的集中接入、分配与终端管理，功能包括：
提供连接点：用于外部设备/传感器/执行器接入系统内部
信号终端：对模拟、数字、通信等信号进行中继或终止
接线整理：统一信号线/电源线的分布和编号，提升维护效率
电气保护：部分终端模块带有简单防雷、限流或隔离功能
主要应用领域：
1. 晶圆处理与搬运系统
为晶圆装载单元、机械臂、真空阀等提供电源及控制信号接入。
集中连接各类传感器，如位置检测、温度检测、真空状态等。
2. 设备内I/O分配与接线管理
用作 TEL 控制系统中 I/O 板卡的接线终端。
通过终端模块统一输出信号到多个执行器或外设。
3. 电源/控制信号布线终端
将控制器输出的低压/中压电源或信号线整理至机架末端或分布单元。
有助于减少干扰和信号衰减，改善布线环境。
4. 接口标准化与调试便利性
便于工程人员快速接入测试工具或替换模块。
对系统进行模块化管理，提升生产线维护效率。
英文资料：
TEL Tokyo Electron 3M81-024341-14 Terminal Module
（Terminal Module）
Product type and function:
This module belongs to the electrical connection terminal unit in the Tokyo Electron semiconductor equipment system, used for centralized access, distribution, and terminal management of multiple signals or power lines. Its functions include:
Provide connection points: for external devices/sensors/actuators to access the internal system
Signal terminal: relay or terminate analog, digital, communication and other signals
Wiring arrangement: Unify the distribution and numbering of signal/power lines to improve maintenance efficiency
Electrical protection: Some terminal modules have simple lightning protection, current limiting or isolation functions
Main application areas:
1. Wafer processing and handling system
Provide power and control signal access for wafer loading units, robotic arms, vacuum valves, etc.
Centralize the connection of various sensors, such as position detection, temperature detection, vacuum status, etc.
2. I/O allocation and wiring management within the device
Used as a wiring terminal for I/O boards in TEL control systems.
Output signals uniformly to multiple actuators or peripherals through terminal modules.
3. Power/control signal wiring terminals
Organize the low/medium voltage power or signal lines output by the controller to the end of the rack or distribution unit.
Helps to reduce interference and signal attenuation, and improve the wiring environment.
4. Interface standardization and debugging convenience
Easy for engineering personnel to quickly access testing tools or replace modules.
Modular management of the system to improve production line maintenance efficiency.
2.产 品 展 示
3.其他产品
ABB 3BHE046836R0101 GFD563A101控制器模块
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| BA3624-7024-9-56BC | HA42A6 | IMASO11 |
