Tokyo Electron 3D39-000002-V4接口盒 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D39-000002-V4 接口盒
（Interface Box）
产品定义与作用：
该接口盒是用于 Tokyo Electron 半导体设备内部的信号中转、接线管理和电气隔离的模块单元，一般集成于系统控制架构中，作用如下：
提供多路输入/输出信号的接线端子或连接口
实现设备控制系统与现场传感器、执行器之间的物理连接
起到信号路由、保护、电源分配等作用
某些型号具备屏蔽、滤波、EMI 保护功能
主要应用领域：
1. 信号集线与转接
将多个 I/O 信号从主控制器或 I/O 板引出，通过接口盒集中分配到不同功能模块。
实现模块化布线，简化设备维护和升级操作。
2. 晶圆处理系统配套
用于晶圆搬运机器人、对位单元、升降平台、真空门等设备与控制系统间的接口桥接。
提供清晰标识的接线端子或工业连接器。
3. 电气隔离与保护
对于模拟信号、数字信号、电源线进行有效隔离与组织。
防止静电放电（ESD）或电磁干扰（EMI）对控制系统造成损害。
4. 调试与故障排查接口
便于维护人员通过接口盒快速测试信号通断或测量电压/电流值。
部分接口盒带有指示灯、保险丝或可替换模块，用于现场排障。
英文资料：
TEL Tokyo Electron 3D39-000002-V4 Interface Box
（Interface Box）
Product Definition and Function:
This interface box is a module unit used for signal transfer, wiring management, and electrical isolation within Tokyo Electron semiconductor equipment. It is generally integrated into the system control architecture and serves the following purposes:
Provide wiring terminals or ports for multiple input/output signals
Establish physical connections between equipment control systems and on-site sensors and actuators
Plays a role in signal routing, protection, power distribution, etc
Some models have shielding, filtering, and EMI protection functions
Main application areas:
1. Signal consolidation and conversion
Extract multiple I/O signals from the main controller or I/O board and distribute them to different functional modules through interface boxes.
Implement modular wiring to simplify equipment maintenance and upgrade operations.
2. Supporting wafer processing system
Used for interface bridging between wafer handling robots, alignment units, lifting platforms, vacuum doors, and control systems.
Provide clearly labeled wiring terminals or industrial connectors.
3. Electrical isolation and protection
Effectively isolate and organize analog signals, digital signals, and power lines.
Prevent damage to the control system caused by electrostatic discharge (ESD) or electromagnetic interference (EMI).
4. Debugging and troubleshooting interface
Easy for maintenance personnel to quickly test signal continuity or measure voltage/current values through the interface box.
Some interface boxes are equipped with indicator lights, fuses, or replaceable modules for on-site troubleshooting.
2.产 品 展 示
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