Tokyo Electron 3381-001039-11照明控制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3381-001039-11 照明控制板简介
一、基本信息
产品型号：3381-001039-11
产品名称：照明控制板（Lighting Control Board）
别名：PST-OPT2
制造商：Tokyo Electron Ltd.（TEL）
典型应用设备：TEL 半导体设备（如涂胶显影机、蚀刻设备等）
二、主要功能
照明电源控制
控制设备内部或工艺腔体内的照明系统，包括供电、启停、亮度调节等。安全与可视性支持
保证设备操作区域或观测窗口的光照充足，提高操作安全性。系统通信与响应
可与主控制系统连接，根据工作流程实现自动开关灯或报警提示功能。
三、应用领域
半导体制造设备（Etcher、Coater/Developer、清洗设备等）
工艺监控区的视觉照明系统
洁净室内设备模块的辅助控制子系统
用于设备维护和替换的备品备件
英文资料：
Introduction to TEL Tokyo Electron 3381-0001039-11 Lighting Control Board
1、 Basic Information
Product model: 3381-001039-11
Product Name: Lighting Control Board
Alias: PST-OPT2
Manufacturer: Tokyo Electron Ltd. (TEL)
Typical application equipment: TEL semiconductor equipment (such as coating and developing machines, etching equipment, etc.)
2、 Main functions
Lighting power control
Control the lighting system inside the equipment or process chamber, including power supply, start stop, brightness adjustment, etc.
Security and visibility support
Ensure sufficient lighting in the equipment operation area or observation window to improve operational safety.
System Communication and Response
Can be connected to the main control system to achieve automatic light on/off or alarm prompt functions according to the workflow.
3、 Application Fields
Semiconductor manufacturing equipment (Etcher, Coater/Developer, cleaning equipment, etc.)
Visual lighting system for process monitoring area
Auxiliary control subsystem of cleanroom equipment module
Spare parts for equipment maintenance and replacement
2.产 品 展 示
3.其他产品
4.其他英文产品
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| IC3600SFKD1 | 531X300CCHAJM2 | IC3600SSLD1E |
