Tokyo Electron DS1181-000957-11接口面板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron DS1181-000957-11 接口面板简介
一、基本信息
型号：DS1181-000957-11
别名：MC-31027
类型：PHOTO MOS接口板
制造商：Tokyo Electron Ltd.（TEL）
应用设备：主要用于TEL Alpha 8se/a8s系列炉体（Furnace）
二、功能描述
信号控制
负责控制设备中的阀门（Valve）和质量流量控制器（MFC）的信号传输，确保流体和气体的准确调节。接口转换
作为电子控制信号的接口面板，实现上位控制系统与执行器之间的信号连接和转换。系统集成
集成于半导体制造设备的自动控制系统，支持设备的精确工艺控制。
三、应用场景
半导体制造设备中的阀门及气体流量控制系统
设备维修及备件替换
工艺流程自动化及稳定性提升
英文资料：
Introduction to TEL Tokyo Electron DS1181-000957-11 Interface Panel
1、 Basic Information
Model: DS1181-000957-11
Nickname: MC-31027
Type: PHOTO MOS interface board
Manufacturer: Tokyo Electron Ltd. (TEL)
Application equipment: mainly used for TEL Alpha 8se/a8s series furnaces
2、 Function Description
Signal Control
Responsible for controlling the signal transmission of valves and mass flow controllers (MFCs) in the equipment, ensuring accurate regulation of fluids and gases.
Interface conversion
As an interface panel for electronic control signals, it enables signal connection and conversion between the upper control system and actuators.
system integration
The automatic control system integrated into semiconductor manufacturing equipment supports precise process control of the equipment.
3、 Application scenarios
Valves and gas flow control systems in semiconductor manufacturing equipment
Equipment maintenance and spare parts replacement
Process automation and stability improvement
2.产 品 展 示
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