Tokyo Electron 1B80-002830-11输入/输出扩展板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 1B80-002830-11 输入/输出扩展板简介
一、基本信息
型号: 1B80-002830-11
名称: 输入/输出扩展板(POU Add-On Board)
制造商: Tokyo Electron Ltd.(TEL)
应用范围: 用于半导体制造设备中,扩展I/O通道的模块
二、功能描述
扩展I/O通道
该扩展板提供额外的输入和输出接口,用以增加设备的控制和监测能力。模块化集成
设计为附加模块,可方便地插入主控制系统,支持设备功能灵活扩展。系统兼容性
与TEL现有控制系统及Meiden系列系统兼容,保证稳定运行。
三、典型应用
用于CVD、Etcher、Coater/Developer等半导体设备的I/O信号扩展。
适合设备升级改造,增加更多输入/输出点。
作为维修替换备件,保障设备长期稳定运行。
四、注意事项
确认扩展板与主控制系统接口匹配,避免安装不兼容导致故障。
按照设备说明书正确安装,避免损坏电路板。
定期检查扩展板的连接状态和信号质量,保证设备控制稳定。
英文资料:
Introduction to TEL Tokyo Electron 1B80-002830-11 Input/Output Expansion Board
1、 Basic Information
Model: 1B80-002830-11
Name: POU Add On Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Application scope: Used as a module for expanding I/O channels in semiconductor manufacturing equipment
2、 Function Description
Expand I/O channels
This expansion board provides additional input and output interfaces to increase the control and monitoring capabilities of the device.
Modular integration
Designed as an additional module, it can be easily inserted into the main control system and supports flexible expansion of device functions.
system compatibility
Compatible with TEL's existing control system and Meiden series system to ensure stable operation.
3、 Typical applications
Used for I/O signal expansion of semiconductor devices such as CVD, Etcher, Coater/Developer, etc.
Suitable for equipment upgrade and renovation, adding more input/output points.
As a replacement spare part for maintenance, it ensures the long-term stable operation of the equipment.
4、 Precautions
Confirm that the expansion board is compatible with the main control system interface to avoid installation incompatibility causing malfunctions.
Install correctly according to the equipment manual to avoid damaging the circuit board.
Regularly check the connection status and signal quality of the expansion board to ensure stable device control.
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