Tokyo Electron 3M81-005973-14输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-005973-14 输入输出模块简介
一、基本信息
产品型号： 3M81-005973-14
名称定义： 输入输出模块（I/O Module）或称为 SFLUX-AMP PCB（信号放大板）
制造商： Tokyo Electron Ltd.（TEL）
适用设备： 半导体工艺设备，如CVD、Etcher、Coater/Developer等平台控制系统中
二、功能与作用
信号输入输出接口
接收和输出数字或模拟信号，用于与现场设备（如传感器、执行器、电磁阀等）建立通信通道。信号放大与整形
集成有信号放大电路（SFLUX-AMP），可对输入信号进行增强或滤波，提升信号质量与稳定性。电气隔离功能
可能具备隔离电路设计，有助于抑制电磁干扰，保护上位控制系统的稳定运行。模块化集成
可与CPU模块、继电器控制板、电源模块等组合组成完整的控制系统，便于替换与维护。
三、典型应用领域
气体供应系统：控制气阀开闭、采集传感器状态。
温控与工艺单元：输入温度、压力等模拟量信号，输出控制指令。
自动化搬运系统：与机械臂、升降平台、传送带等设备进行交互控制。
真空或清洗设备：反馈腔体压力、门状态、水气开关等状态信息。
英文资料：
Introduction to TEL Tokyo Electron 3M81-005973-14 Input/Output Module
1、 Basic Information
Product model: 3M81-005973-14
Name definition: Input/Output Module (I/O Module) or SFLUX-AMP PCB (Signal Amplification Board)
Manufacturer: Tokyo Electron Ltd. (TEL)
Applicable equipment: Semiconductor process equipment, such as CVD, Etcher, Coater/Developer and other platform control systems
2、 Function and Function
Signal input/output interface
Receive and output digital or analog signals for establishing communication channels with field devices such as sensors, actuators, solenoid valves, etc.
Signal amplification and shaping
Integrated with signal amplification circuit (SFLUX-AMP), it can enhance or filter the input signal to improve signal quality and stability.
Electrical isolation function
Possible isolation circuit design can help suppress electromagnetic interference and protect the stable operation of the upper control system.
Modular integration
It can be combined with CPU modules, relay control boards, power modules, etc. to form a complete control system, making it easy to replace and maintain.
3、 Typical application areas
Gas supply system: Control the opening and closing of gas valves and collect sensor status.
Temperature control and process unit: Input analog signals such as temperature and pressure, and output control commands.
Automated handling system: interacts and controls with equipment such as robotic arms, lifting platforms, and conveyor belts.
Vacuum or cleaning equipment: feedback on chamber pressure, door status, water and gas switch status information.
2.产 品 展 示
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