Tokyo Electron 2L87-132494-12伺服电机 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号： 2L87-132494-12
产品名称： 伺服电机（Servo Motor）
制造商： Tokyo Electron Ltd.（TEL）
产品类别： 精密电机驱动部件
典型用途： 用于TEL半导体设备中的晶圆搬运、定位、旋转等自动化系统
二、主要功能
高精度位置控制
该伺服电机与编码器协同工作，实现微米级位置反馈和高速动态响应，用于机械臂、平台滑轨、载物台的精准移动。闭环伺服反馈系统
搭载绝对值或增量式编码器，电机状态实时反馈至主控制器，保证运动过程的闭环控制与安全。高可靠性与洁净室适应性
采用低发尘材料、密封结构，符合半导体洁净环境等级要求，支持 24 小时连续运转。
三、典型应用场景
晶圆装载单元（Load Port）：控制机械手或升降装置，实现晶圆精准放置。
涂胶显影系统（Coater/Developer）：用于旋转平台或工艺腔体定位机构。
蚀刻或CVD设备：驱动气阀控制系统或进样/出样移动装置。
自动对位系统：实现高速对准、升降、偏移修正等动作控制。
英文资料：
1、 Basic Information
Product model: 2L87-132494-12
Product Name: Servo Motor
Manufacturer: Tokyo Electron Ltd. (TEL)
Product Category: Precision Motor Drive Components
Typical use: Used for automated systems such as wafer handling, positioning, and rotation in TEL semiconductor equipment
2、 Main functions
High precision position control
This servo motor works in conjunction with an encoder to achieve micrometer level position feedback and high-speed dynamic response, used for precise movement of robotic arms, platform slides, and stages.
Closed loop servo feedback system
Equipped with absolute or incremental encoders, the motor status is fed back to the main controller in real-time, ensuring closed-loop control and safety during the motion process.
High reliability and cleanroom adaptability
Adopting low dust materials and sealed structure, it meets the requirements of semiconductor clean environment level and supports 24-hour continuous operation.
3、 Typical application scenarios
Load Port: Control the robotic arm or lifting device to achieve precise placement of wafers.
Coater/Developer: Used for rotating platforms or process chamber positioning mechanisms.
Etching or CVD equipment: Drive gas valve control system or sample injection/extraction moving device.
Automatic alignment system: realizes high-speed alignment, lifting, offset correction and other action control.
2.产 品 展 示
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