Tokyo Electron 1B80-002788-11传感器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
型号：1B80-000226-13
类型：传感器信号采集板 / Sensor Input Board
生产厂商：Tokyo Electron (TEL)
二、主要功能
检测信号采集：接收温度、压力、流量、湿度等多种传感器信号。
信号转换：将模拟信号（如 4‑20 mA、0‑10 V）或数字信号转换为控制系统可识别的格式。
信号隔离与抗干扰：通过光耦或隔离放大器提高精度与稳定性。
反馈给主控单元：将处理后的数据通过背板总线或通信总线传送给 CPU 或控制器模块。
三、典型应用
CVD/ALD/Etcher 等工艺设备：用于监测反应腔体的温度和压力。
气体控制系统：采集流量计与压力传感器的信号，实现工艺控制。
温控与冷却系统：采集热电偶/RTD 的温度信号，用于闭环温控系统。
安全控制：通过多路传感器监测设备状态，提高操作可靠性与安全性。
四、推测技术特性
支持多路输入信号通道（具体通道数需查证）
接口类型可能包括螺丝端子或DIN插头
工业级隔离设计，适合洁净室运行环境
与 TEL 常见平台（如 Trias、Unity II、Celesta）兼容
英文资料：
1、 Basic Information
Model: 1B80-000226-13
Type: Sensor Signal Acquisition Board/Sensor Input Board
Manufacturer: Tokyo Electron (TEL)
2、 Main functions
Detection signal acquisition: Receive various sensor signals such as temperature, pressure, flow rate, humidity, etc.
Signal conversion: Convert analog signals (such as 4-20mA, 0-10V) or digital signals into a format recognizable by the control system.
Signal isolation and anti-interference: Improve accuracy and stability through optocouplers or isolation amplifiers.
Feedback to the main control unit: Transfer the processed data to the CPU or controller module through the backplane bus or communication bus.
3、 Typical applications
CVD/ALD/Etcher and other process equipment: used to monitor the temperature and pressure of the reaction chamber.
Gas control system: Collect signals from flow meters and pressure sensors to achieve process control.
Temperature control and cooling system: Collect temperature signals from thermocouples/RTDs for closed-loop temperature control systems.
Safety control: By monitoring equipment status through multiple sensors, operational reliability and safety are improved.
4、 Speculate on technical characteristics
Support multiple input signal channels (specific number of channels to be verified)
Interface types may include screw terminals or DIN plugs
Industrial grade isolation design, suitable for clean room operating environment
Compatible with common TEL platforms such as Trias, Unity II, Celesta
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 2668 180-291 slot control
ABB P8480 Analog Output Module
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