Tokyo Electron 2L81-050032-14传感器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 2L81-050032-14 传感器模块 是一款专门用于半导体制造设备中的检测与反馈单元,主要功能是采集设备运行状态的各种物理量(如温度、压力、位置、气体浓度等)并将信号传输给控制系统,确保设备工艺过程的精确控制和安全运行。
一、产品基本信息
型号: 2L81-050032-14
名称: 传感器模块(Sensor Module)
制造商: Tokyo Electron Ltd.(TEL)
应用类别: 工艺参数检测与信号采集模块
二、核心功能
多类型传感器集成
可能集成多种传感器,如温度传感器(热电偶/RTD)、压力传感器、气体传感器、位置开关等。
信号采集与转换
将传感器输出的模拟或数字信号进行采集、处理并转换为控制系统可识别的信号格式。
实时监测与反馈
实时监控关键工艺参数,支持设备自动调节和报警。
抗干扰设计
确保信号的准确性和稳定性,减少环境噪声影响。
英文资料:
The TEL Tokyo Electron 2L81-050032-14 sensor module is a detection and feedback unit specifically designed for semiconductor manufacturing equipment. Its main function is to collect various physical quantities of equipment operating status (such as temperature, pressure, position, gas concentration, etc.) and transmit signals to the control system to ensure precise control and safe operation of the equipment process.
1、 Basic Product Information
Model: 2L81-050032-14
Name: Sensor Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Application category: Process parameter detection and signal acquisition module
2、 Core functions
Multi type sensor integration
Multiple sensors may be integrated, such as temperature sensors (thermocouples/RTDs), pressure sensors, gas sensors, position switches, etc.
Signal acquisition and conversion
Collect, process, and convert the analog or digital signals output by sensors into a signal format recognizable by the control system.
Real time monitoring and feedback
Real time monitoring of key process parameters, supporting automatic adjustment and alarm of equipment.
anti-interference design
Ensure the accuracy and stability of the signal, and reduce the impact of environmental noise.
2.产 品 展 示
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