Tokyo Electron 3M87-024252-23控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M87-024252-23 控制器模块 是一款应用于半导体制造设备中的控制核心单元模块，主要用于对设备各个功能模块（如气体系统、温控系统、运动机构等）进行统一管理、逻辑运算和控制指令下发，是实现自动化精密工艺控制的关键组成部分。
一、基本信息
产品型号： 3M87-024252-23
产品名称： 控制器模块（Controller Module）
制造商： Tokyo Electron Ltd.（TEL）
模块类型： 嵌入式控制系统组件 / 工艺控制卡件
适用平台： 可能用于 TEL 的涂胶显影（Coater/Developer）、CVD、Etcher 或 ALD 系统等。
二、核心功能
工艺流程控制
运行 TEL 设备控制逻辑，用于管理各工艺步骤的启停、切换、计时、同步等。
外围模块协调
与 I/O 板、气阀控制板、驱动模块、温控板等协同工作，执行逻辑动作控制。
设备状态监控与反馈
实时采集各子系统的运行状态，并根据设定条件作出判断、反馈或报警。
与主系统通信
通过系统总线（如 TEL 专用总线、Ethernet、CAN 等）与主机或上位系统交互数据。
嵌入式程序运行
内部可能搭载嵌入式处理器与固化软件，用于执行特定工艺控制程序。
三、典型应用领域
涂胶显影系统（Coater/Developer）
控制晶圆传输、旋转、涂胶、显影步骤的节拍与条件判断。
CVD / ALD 设备
管理反应气体的切换、温度设定、沉积过程的节拍逻辑。
等离子蚀刻系统
控制等离子源开启/关闭、RF电源状态、腔体气压与气流调节等关键参数。
后段封装/清洗模块
实现流体/溶液控制、泵阀切换、循环时间控制、废液排放等操作管理。
英文资料：
The TEL Tokyo Electron 3M87-024252-23 controller module is a control core unit module used in semiconductor manufacturing equipment. It is mainly used for unified management, logical operation, and control instruction issuance of various functional modules of the equipment (such as gas system, temperature control system, motion mechanism, etc.), and is a key component for achieving automated precision process control.
1、 Basic Information
Product model: 3M87-024252-23
Product Name: Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Module Type: Embedded Control System Components/Process Control Cards
Applicable platforms: May be used for TEL coating/developer, CVD, Etcher, or ALD systems, etc.
2、 Core functions
Process control
Run TEL device control logic to manage the start stop, switching, timing, synchronization, etc. of each process step.
Peripheral module coordination
Collaborate with I/O board, air valve control board, driver module, temperature control board, etc. to execute logical action control.
Equipment status monitoring and feedback
Real time collection of the operating status of each subsystem, and making judgments, feedback, or alarms based on set conditions.
Communicate with the main system
Interact data with the host or upper system through system buses such as TEL dedicated buses, Ethernet, CAN, etc.
Embedded program running
Internally, it may be equipped with embedded processors and fixed software for executing specific process control programs.
3、 Typical application areas
Coater/Developer system
Control the rhythm and condition judgment of wafer transfer, rotation, coating, and development steps.
CVD/ALD equipment
Manage the switching of reaction gases, temperature settings, and the rhythm logic of the deposition process.
Plasma etching system
Control key parameters such as plasma source on/off, RF power status, chamber pressure and airflow regulation.
Rear packaging/cleaning module
Implement fluid/solution control, pump valve switching, circulation time control, waste liquid discharge and other operational management.
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