Tokyo Electron 81-690004-1电机单元分布板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 81-690004-1 电机单元分布板
产品概述：
81-690004-1 是 Tokyo Electron（TEL）设备中的专用控制分布板，用于多个电机单元的电源与控制信号集中管理，常用于 EFEM、Load Port、CVD、Etch 等系统中的电机驱动模块之间的协调控制。
功能特点：
电源分配功能
将主电源（如 +24V 或 +48V DC）统一分配至多个电机控制器或驱动模块，支持独立保险或状态指示。控制信号管理
接收来自主控系统的启停、方向、脉冲等控制信号，并分发至各个电机通道，实现多轴同步控制。状态反馈整合
汇总各个电机驱动模块的运行、报警、到位等信号，并反馈给上位控制系统，实现整体状态监控。保护功能
每路通道带有过流保护、电压隔离、短路防护等，确保系统运行稳定可靠。
典型应用：
EFEM模块：控制搬运机械臂、对位平台、升降机构等电机；
Load Port装置：驱动 FOUP 门机构或推送机构；
刻蚀系统：用于腔体内活动部件控制；
涂胶/显影设备：用于托盘、转台等执行机构的控制。
技术参数（典型值）：
输入电压：+24V DC 或 +48V DC
控制通道：4~8 路电机控制输出通道
接口类型：多种排线、接插件连接方式
通信方式：通过背板或排线与控制主板连接
工作环境：洁净室兼容，0~50℃，抗干扰设计
英文资料：
TEL Tokyo Electron 81-69004-1 Motor Unit Distribution Board
Product Overview:
81-69004-1 is a dedicated control distribution board in Tokyo Electron (TEL) equipment, used for centralized management of power and control signals for multiple motor units. It is commonly used for coordinated control between motor drive modules in EFEM, Load Port, CVD, Etch and other systems.
Functional features:
Power distribution function
Distribute the main power supply (such as+24V or+48V DC) uniformly to multiple motor controllers or drive modules, supporting independent insurance or status indication.
Control signal management
Receive control signals such as start stop, direction, and pulse from the main control system, and distribute them to various motor channels to achieve multi axis synchronous control.
Integration of status feedback
Summarize the operation, alarm, and arrival signals of each motor drive module and provide feedback to the upper control system to achieve overall status monitoring.
Protection function
Each channel is equipped with overcurrent protection, voltage isolation, short circuit protection, etc., to ensure stable and reliable system operation.
Typical applications:
EFEM module: controls motors for handling robotic arms, alignment platforms, lifting mechanisms, etc;
Load Port device: drives FOUP door mechanism or push mechanism;
Etching system: used for controlling moving parts inside the cavity;
Gluing/developing equipment: used for controlling actuators such as trays and turntables.
Technical parameters (typical values):
Input voltage:+24V DC or+48V DC
Control channel: 4-8 motor control output channels
Interface type: Multiple cable and connector connection methods
Communication method: Connected to the control motherboard through a backplane or ribbon cable
Work environment: cleanroom compatible, 0-50 ℃, anti-interference design
2.产 品 展 示
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