Tokyo Electron 1B80-002816-11数字量控制板卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1B80-002816-11 数字量控制板卡（Digital I/O Control Board） 是一款用于 Tokyo Electron 半导体设备中的高可靠性数字信号控制模块，主要承担设备各子系统之间的数字输入采集与数字输出控制功能。它广泛应用于 TEL 的刻蚀（Etch）、沉积（CVD）、清洗（Wet Bench）、前端模块（EFEM）等设备中，是实现工艺动作逻辑执行、状态检测与安全联锁的核心部件之一。
一、基本信息
产品型号： 1B80-002816-11
产品名称： 数字量控制板卡（Digital I/O Control Board）
制造商： Tokyo Electron Ltd.（TEL）
模块类型： 开关量输入/输出控制卡件
安装方式： 插拔式模块，安装于控制主机机架或分布式控制盒中
二、核心功能
数字输入采集（DI）
采集设备状态信号，如限位开关、门锁状态、气压传感器、报警触点等；
支持多路通道并行采集，适配高速设备动作反馈要求。
数字输出控制（DO）
控制电磁阀、继电器、马达启停、报警灯、门禁系统等执行组件；
输出响应速度快，适用于实时控制场景。
安全联锁执行
实现如“开门联锁”“真空保护”“温度报警”类逻辑控制，确保工艺安全；
支持联锁触发中断控制机制。
隔离与保护设计
所有输入/输出通道具备光耦隔离，防止信号干扰；
内置过压、过流、短路保护，支持热插拔。
英文资料：
TEL Tokyo Electron 1B80-002816-11 Digital I/O Control Board is a high reliability digital signal control module used in Tokyo Electron semiconductor equipment, mainly responsible for digital input acquisition and digital output control functions between various subsystems of the equipment. It is widely used in equipment such as Etch, CVD, Wet Bench, and EFEM in TEL, and is one of the core components for implementing process action logic execution, status detection, and safety interlocking.
1、 Basic Information
Product model: 1B80-002816-11
Product Name: Digital I/O Control Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: switch input/output control card
Installation method: Plug in module, installed in the control host rack or distributed control box
2、 Core functions
Digital Input Acquisition (DI)
Collect equipment status signals, such as limit switches, door lock status, air pressure sensors, alarm contacts, etc;
Support multi-channel parallel acquisition and adapt to high-speed device action feedback requirements.
Digital Output Control (DO)
Control solenoid valves, relays, motor start stop, alarm lights, access control systems and other execution components;
Fast output response speed, suitable for real-time control scenarios.
Safety interlock execution
Implement logic controls such as "door interlock", "vacuum protection", and "temperature alarm" to ensure process safety;
Support interlock triggered interrupt control mechanism.
Isolation and protection design
All input/output channels are equipped with optocoupler isolation to prevent signal interference;
Built in overvoltage, overcurrent, and short-circuit protection, supporting hot swapping.
2.产 品 展 示
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