Tokyo Electron 2L81-050213-16控制脉冲卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2L81-050213-16 控制脉冲卡件（Control Pulse Board / Pulse Control Module） 是用于 Tokyo Electron 半导体设备中的精密控制模块，主要负责向执行机构输出脉冲信号，用于控制伺服驱动、步进电机、阀门驱动器或其他基于脉冲输入的设备。该卡件多用于高精度定位与定时控制场合，在 TEL 的刻蚀、CVD、搬运系统（EFEM）、涂胶显影（Coater/Developer）等设备中扮演关键控制角色。
一、基本信息
产品型号： 2L81-050213-16
产品名称： 控制脉冲卡件（Control Pulse Card / Pulse Output Board）
制造商： Tokyo Electron Ltd.（TEL）
模块类型： 脉冲信号输出控制板
安装方式： 控制架构中插板式安装，连接主控系统（如 BX81/E244）
二、核心功能
脉冲输出控制
输出设定频率、占空比、周期的脉冲信号；
用于驱动步进电机、脉冲型执行器、光栅对位单元等。
高精度定时控制
可精确控制脉冲宽度与间隔，实现亚毫秒级控制精度；
多通道输出支持多轴或多单元同步动作。
响应工艺逻辑信号
根据主控模块的程序流程发出启动、停止、调速等脉冲指令；
可配合限位检测、反馈信号实现闭环控制（与其他板卡联动）。
信号隔离与保护
通道隔离输出，防止信号串扰；
具备过流、短路保护机制。
英文资料：
TEL Tokyo Electron 2L81-050213-16 Control Pulse Board/Pulse Control Module is a precision control module used in Tokyo Electron semiconductor equipment, mainly responsible for outputting pulse signals to actuators for controlling servo drives, stepper motors, valve drivers, or other pulse input based devices. This card is commonly used for high-precision positioning and timing control, in TEL etching CVD、 Plays a key control role in equipment such as EFEM and Coater/Developer.
1、 Basic Information
Product model: 2L81-050213-16
Product Name: Control Pulse Card/Pulse Output Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Pulse signal output control board
Installation method: Plug in installation in the control architecture, connected to the main control system (such as BX81/E244)
2、 Core functions
Pulse output control
Output pulse signals with set frequency, duty cycle, and period;
Used to drive stepper motors, pulse type actuators, grating alignment units, etc.
High precision timing control
Accurate control of pulse width and interval, achieving sub millisecond level control accuracy;
Multi channel output supports synchronous actions of multiple axes or units.
Responding to process logic signals
Send pulse commands such as start, stop, and speed control according to the program flow of the main control module;
Can be used in conjunction with limit detection and feedback signals to achieve closed-loop control (linked with other boards).
Signal isolation and protection
Channel isolation output to prevent signal crosstalk;
Equipped with overcurrent and short-circuit protection mechanisms.
2.产 品 展 示
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