Tokyo Electron 308-600223-4控制主板卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 308-600223-4 控制主板卡件（Main Control Board / Controller Card） 是一款用于半导体制造设备中的核心控制单元，通常部署在 Tokyo Electron（TEL）设备的主控系统内部，作为系统运行的指令处理中心之一。它负责协调信号输入输出、执行逻辑控制流程，并与上位管理系统及其他功能模块进行高速通信。
一、基本信息
产品型号： 308-600223-4
产品名称： 控制主板卡件（Control Main Board / Controller PCB）
制造商： Tokyo Electron Ltd.（TEL）
所属设备平台： TEL Etch / CVD / Coater / Developer / EFEM 系列
模块类型： 嵌入式控制处理板卡
二、主要功能
工艺流程控制
执行设备的自动控制逻辑程序；
管理腔体、温控、阀门、电源等工艺子系统的运行序列。
数据处理与通信
接收和处理来自 I/O 板卡、传感器的实时数据；
与 TEL 系统主干控制网络或上位 MES/HMI 进行高速通信。
联动与安全控制
实现设备安全联锁控制（如开门保护、真空联锁等）；
提供故障报警和状态反馈机制。
模块间协调管理
协调多个功能模块如伺服控制板、电源分配板、接口模块的同步运行；
控制信号路由与输出到下游执行单元。
英文资料：
TEL Tokyo Electron 308-600223-4 Main Control Board/Controller Card is a core control unit used in semiconductor manufacturing equipment, typically deployed within the main control system of Tokyo Electron (TEL) devices as one of the instruction processing centers for system operation. It is responsible for coordinating signal input and output, executing logical control processes, and performing high-speed communication with the upper management system and other functional modules.
1、 Basic Information
Product model: 308-600223-4
Product Name: Control Main Board/Controller PCB
Manufacturer: Tokyo Electron Ltd. (TEL)
Equipment platform: TEL Etch/CVD/Coater/Developer/EFEM series
Module Type: Embedded Control Processing Board
2、 Main functions
Process control
Execute the automatic control logic program of the device;
Manage the operational sequence of process subsystems such as chambers, temperature control, valves, and power supply.
Data Processing and Communication
Receive and process real-time data from I/O boards and sensors;
High speed communication with TEL system backbone control network or upper MES/HMI.
Linkage and safety control
Implement equipment safety interlock control (such as door opening protection, vacuum interlock, etc.);
Provide fault alarm and status feedback mechanism.
Coordination and management between modules
Coordinate the synchronous operation of multiple functional modules such as servo control board, power distribution board, and interface module;
Route and output control signals to downstream execution units.
2.产 品 展 示
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