Tokyo Electron 3D80-001480-V1电源单元组件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Tokyo Electron 3D80-001480-V1 电源单元组件（Power Supply Unit Assembly） 是一款用于半导体设备中的工业级电源模块组件，专为 Tokyo Electron（TEL）高精密设备控制系统提供稳定、可靠的多路直流电源输出，保障各功能模块（如处理器、I/O控制板、接口模块、传感器系统等）长时间稳定运行。
一、基本信息
产品型号： 3D80-001480-V1
产品名称： 电源单元组件（Power Supply Unit Assembly）
制造商： Tokyo Electron Ltd.（TEL）
组件类型： 模块化电源系统 / 工业电源分配组件
典型设备应用： TEL Etch、CVD、Coater/Developer、EFEM 等主控制机架内
二、核心功能
多路直流电源输出
向多个子系统提供不同电压等级（如 +24V、+12V、+5V、±15V DC）；
满足控制系统、I/O模块、CPU板、显示模块等对电源的需求。
输入电压稳压与滤波
接收 AC 或 DC 主输入电源，通过内部整流与稳压电路进行处理；
内置滤波、浪涌抑制、过压保护等功能，提升系统稳定性。
模块化输出接口
采用背板插接或航空插头方式，将电源输出连接到各控制板卡；
支持冗余输出、独立通道管理，提高系统可靠性与维护效率。
系统状态监控
具备输出状态监控、故障诊断（如过载、过温、欠压）；
可将电源状态信号反馈给主控系统（如3D81-或E244系列控制器）。
英文资料：
The Tokyo Electron 3D80-001480-V1 Power Supply Unit Assembly is an industrial grade power module component used in semiconductor equipment. It is designed to provide stable and reliable multi-channel DC power output for the high-precision equipment control system of Tokyo Electron (TEL), ensuring the long-term stable operation of various functional modules such as processors, I/O control boards, interface modules, sensor systems, etc.
1、 Basic Information
Product model: 3D80-001480-V1
Product Name: Power Supply Unit Assembly
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: Modular power system/Industrial power distribution component
Typical equipment applications: TEL Etch, CVD, Coater/Developer, EFEM and other main control racks
2、 Core functions
Multi channel DC power output
Provide different voltage levels (such as+24V,+12V,+5V, ± 15V DC) to multiple subsystems;
Meet the power requirements of control systems, I/O modules, CPU boards, display modules, etc.
Input voltage stabilization and filtering
Receive AC or DC main input power and process it through internal rectification and voltage regulation circuits;
Built in filtering, surge suppression, overvoltage protection and other functions enhance system stability.
Modular output interface
Connect the power output to each control board using backplane or aviation plugs;
Support redundant output and independent channel management to improve system reliability and maintenance efficiency.
System status monitoring
Capable of output status monitoring and fault diagnosis (such as overload, overheating, undervoltage);
The power status signal can be fed back to the main control system (such as 3D81- or E244 series controllers).
2.产 品 展 示
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