Tokyo Electron REX-B860-CS1数字输入模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron REX-B860-CS1 数字输入模块(Digital Input Module) 是一款专为半导体制造设备设计的工业级信号采集单元,主要负责接收和管理来自现场传感器、开关装置、联锁系统等的数字量(DI)信号,是控制系统实现实时监控和动作判断的重要部件之一。
一、基本信息
产品型号: REX-B860-CS1
产品名称: 数字输入模块(Digital Input Module)
制造商: Tokyo Electron Ltd.(TEL)
模块类型: 控制系统 I/O 子模块
信号类型: 数字量输入(通常为 24V DC 或 TTL 逻辑)
二、主要功能
数字信号采集
接收来自传感器、按钮、限位开关、门控系统等的开关信号;
采集信号可用于工艺启停控制、安全联锁、设备反馈等。
状态判断与实时响应
将采集的 ON/OFF 状态上报至主控制器(如 E244 系列 SBC);
支持实时判断并触发相应设备动作,如气阀开关、机械动作联动等。
信号隔离与防护
通道具备光电隔离,增强抗干扰能力;
每通道设有输入电压保护、防反接等工业级防护机制。
模块通信与总线集成
与 TEL 控制背板或现场总线(如 RS485、CAN、TTL 并行总线)连接;
可组合多个数字输入模块,构建大规模信号采集网络。
英文资料:
The TEL Tokyo Electron REX-B860-CS1 Digital Input Module is an industrial grade signal acquisition unit designed specifically for semiconductor manufacturing equipment. It is mainly responsible for receiving and managing digital (DI) signals from on-site sensors, switch devices, interlocking systems, etc. It is one of the important components for real-time monitoring and action judgment in control systems.
1、 Basic Information
Product model: REX-B860-CS1
Product Name: Digital Input Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Control system I/O submodule
Signal type: Digital input (usually 24V DC or TTL logic)
2、 Main functions
Digital signal acquisition
Receive switch signals from sensors, buttons, limit switches, door control systems, etc;
The collected signals can be used for process start stop control, safety interlocking, equipment feedback, etc.
Status judgment and real-time response
Report the collected ON/OFF status to the main controller (such as E244 series SBC);
Support real-time judgment and triggering of corresponding device actions, such as valve opening and closing, mechanical action linkage, etc.
Signal isolation and protection
The channel has photoelectric isolation to enhance anti-interference ability;
Each channel is equipped with industrial grade protection mechanisms such as input voltage protection and anti reverse connection.
Module communication and bus integration
Connect to TEL control backplane or fieldbus (such as RS485, CAN, TTL parallel bus);
Multiple digital input modules can be combined to construct a large-scale signal acquisition network.
2.产 品 展 示
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