Tokyo Electron 3M81-039749-23 PCB板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M81-039749-23 PCB板 是 Tokyo Electron 半导体制造设备中关键的印刷电路板，主要用于设备控制系统的信号处理与连接。该PCB板通常集成信号接口、电源分配和辅助控制功能，是设备内部电子系统的重要组成部分。
以下为该PCB板的详细产品应用领域及功能说明（无图案）：
一、基本信息
产品型号： 3M81-039749-23
产品名称： 印刷电路板（PCB）
制造商： Tokyo Electron Ltd.（TEL）
部件类别： 控制系统专用PCB板
二、主要功能
信号接口与连接
实现设备各控制模块间的电气连接与信号传输；
兼容多种信号类型，支持数字与模拟信号的稳定传递。
电源管理
负责为各电子元件和模块提供稳定的电源供应；
集成滤波和稳压元件，保障系统运行可靠。
辅助控制逻辑
搭载部分逻辑电路，辅助实现设备功能控制和状态判断；
支持与主控板及其他I/O模块的通信与协调。
三、典型应用领域
刻蚀设备（Etcher）
用于信号集成与分配，支持气体流控、射频功率控制等系统。CVD及ALD设备
控制温度、压力传感信号的接口处理及执行器信号输出。输送系统及前后处理设备
管理机械动作、位置反馈等信号，确保晶圆搬运安全可靠。
英文资料：
The TEL Tokyo Electron 3M81-039749-23 PCB board is a key printed circuit board in Tokyo Electron semiconductor manufacturing equipment, mainly used for signal processing and connection of equipment control systems. This PCB board typically integrates signal interfaces, power distribution, and auxiliary control functions, and is an important component of the internal electronic system of the device.
The following is a detailed product application area and functional description of the PCB board (without patterns):
1、 Basic Information
Product model: 3M81-039749-23
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Ltd. (TEL)
Component category: Control system dedicated PCB board
2、 Main functions
Signal interface and connection
Realize electrical connections and signal transmission between various control modules of the equipment;
Compatible with multiple signal types, supporting stable transmission of digital and analog signals.
Power management
Responsible for providing stable power supply for various electronic components and modules;
Integrate filtering and voltage stabilizing components to ensure reliable system operation.
Auxiliary control logic
Equipped with partial logic circuits to assist in achieving device function control and status judgment;
Support communication and coordination with the main control board and other I/O modules.
3、 Typical application areas
Etcher equipment
Used for signal integration and distribution, supporting systems such as gas flow control and RF power control.
CVD and ALD equipment
Interface processing and actuator signal output for temperature and pressure sensing signals.
Conveyor system and pre-processing equipment
Manage mechanical actions, position feedback, and other signals to ensure safe and reliable wafer handling.
2.产 品 展 示
3.其他产品
ABB 3BHE046836R0101 GFD563A101控制器模块
4.其他英文产品
HE700GEN200 Network Interface Module
ABB UN0503a-P Digital Output Module
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