Tokyo Electron 381-500242-B输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-500242-B 输入输出模块（I/O Module） 是 Tokyo Electron 半导体制造设备中用于采集和输出控制信号的核心功能部件之一。此类模块广泛应用于 TEL 的刻蚀设备（Etcher）、CVD、ALD、光刻前后处理设备以及输送系统（EFEM、Load Port）中，主要功能是管理与设备运行相关的各种传感器和执行器之间的信号交互。
以下为不含图案的详细技术与应用说明：
一、基本信息
产品型号： 381-500242-B
产品名称： 输入输出模块（I/O Module）
制造商： Tokyo Electron Ltd.（TEL）
模块类别： 控制系统 I/O 板卡（Digital/Analog Input-Output）
二、核心功能
输入信号采集
支持采集来自限位开关、传感器、光电检测器、真空/温度监测设备等的数字量或模拟量信号；
实时传输至主控制器进行逻辑判断与动作触发。
输出信号控制
向电磁阀、继电器、步进驱动器、加热器等设备输出控制信号；
实现自动化动作的触发（如腔体门开启、平台移动、阀门切换等）。
信号隔离与抗干扰
支持电气隔离设计，保障设备在高EMI环境下的信号稳定；
内置防反接、防过载保护电路。
系统联动与紧急控制
与主控系统联动，实现复杂工艺流程的同步控制；
支持安全联锁（interlock）、急停回路、状态反馈处理。
三、典型应用场景
刻蚀设备（Etcher）
控制气体阀门、真空腔门、射频电源联动，监控气压/温度等状态。
CVD/ALD 系统
输出气体路径选择信号，输入反应腔压力、流速监控数据。
清洗系统
控制药液进出、加热板工作、排水动作，监测液位和温度。
输送系统（EFEM/Load Port）
控制晶圆传送机构、对位系统、门锁系统、传感器状态回馈。
光刻前后处理设备
控制旋转台、加热冷却装置、自动对准设备的启动和状态检测。
英文资料：
The TEL Tokyo Electron 381-500242-B Input/Output Module (I/O Module) is one of the core functional components used in Tokyo Electron semiconductor manufacturing equipment for collecting and outputting control signals. This type of module is widely used in TEL's etching equipment (Etcher), CVD, ALD, lithography pre-processing and post-processing equipment, as well as transport systems (EFEM, Load Port). Its main function is to manage the signal interaction between various sensors and actuators related to equipment operation.
The following are detailed technical and application instructions without patterns:
1、 Basic Information
Product model: 381-500242-B
Product Name: I/O Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Module Category: Control System I/O Board (Digital/Analog Input Output)
2、 Core functions
Input signal acquisition
Support the collection of digital or analog signals from limit switches, sensors, photodetectors, vacuum/temperature monitoring equipment, etc;
Real time transmission to the main controller for logical judgment and action triggering.
Output signal control
Output control signals to devices such as solenoid valves, relays, stepper drivers, heaters, etc;
Trigger automated actions (such as opening chamber doors, moving platforms, switching valves, etc.).
Signal isolation and anti-interference
Support electrical isolation design to ensure signal stability of equipment in high EMI environments;
Built in anti reverse and anti overload protection circuits.
System linkage and emergency control
Integrate with the main control system to achieve synchronous control of complex process flows;
Support safety interlock, emergency stop circuit, and status feedback processing.
3、 Typical application scenarios
Etcher equipment
Control gas valves, vacuum chamber doors, RF power supply linkage, monitor gas pressure/temperature and other status.
CVD/ALD system
Output gas path selection signal, input reaction chamber pressure and flow rate monitoring data.
Cleaning system
Control the inflow and outflow of medication, heating plate operation, drainage action, and monitor the liquid level and temperature.
Conveyor System (EFEM/Load Port)
Control the wafer transfer mechanism, alignment system, door lock system, and sensor status feedback.
Photolithography pre-processing and post-processing equipment
Control the start-up and status detection of the rotary table, heating and cooling device, and automatic alignment equipment.
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