Tokyo Electron 1B80-002815-11采集卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1B80-002815-11 采集卡（Data Acquisition Card, DAQ） 是一款用于半导体制造设备中的高精度信号采集模块，主要负责从设备传感器、监测单元等部分采集模拟量或数字量信号，并传输至中央控制系统进行处理和控制决策。它广泛应用于 Tokyo Electron 的刻蚀、CVD、清洗、输送等关键工艺设备中。
以下为该模块的详细功能与产品应用领域分析（不含图案）：
一、基本信息
产品型号： 1B80-002815-11
产品名称： 采集卡（Data Acquisition Card）
制造商： Tokyo Electron Ltd.（TEL）
模块类型： 信号采集与转换模块（模拟/数字输入）
二、核心功能
传感器信号采集
从设备上的压力传感器、温度探头、流量计、电流/电压监测器等输入端采集实时工艺参数；
支持多通道模拟输入（AI）和数字输入（DI），具备一定的分辨率和采样频率。
模拟-数字转换（ADC）
对模拟信号进行A/D转换，使其可供中央控制系统（如 E244 控制器）读取与判断；
支持精度较高的12位或16位ADC（依据TEL模块设计标准）。
状态反馈与报警联动
实时检测工艺状态变化（如温度超限、真空泄露、电流异常），并触发报警或保护机制；
参与系统的故障自诊断与闭环控制逻辑。
与主控模块通讯
通过TEL专用总线或工业标准总线（如RS-485、TTL）与主控板、I/O模块等其他部件通信；
将采集的数据上传至上位系统，供实时监控或工艺调整。
英文资料：
TEL Tokyo Electron 1B80-002815-11 Data Acquisition Card (DAQ) is a high-precision signal acquisition module used in semiconductor manufacturing equipment. It is mainly responsible for collecting analog or digital signals from equipment sensors, monitoring units, and other parts, and transmitting them to the central control system for processing and control decision-making. It is widely used in the etching process of Tokyo Electron CVD、 In key process equipment such as cleaning and conveying.
The following is a detailed analysis of the module's functions and product application areas (excluding patterns):
1、 Basic Information
Product model: 1B80-002815-11
Product Name: Data Acquisition Card
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Signal acquisition and conversion module (analog/digital input)
2、 Core functions
Sensor signal acquisition
Real time process parameters are collected from input terminals such as pressure sensors, temperature probes, flow meters, and current/voltage monitors on the equipment;
Supports multi-channel analog input (AI) and digital input (DI), with a certain resolution and sampling frequency.
Analog to Digital Conversion (ADC)
Perform A/D conversion on analog signals to enable them to be read and judged by central control systems (such as E244 controllers);
Supports high-precision 12 bit or 16 bit ADCs (according to TEL module design standards).
Status feedback and alarm linkage
Real time detection of changes in process status (such as temperature exceeding limits, vacuum leakage, abnormal current), and triggering of alarms or protection mechanisms;
Participate in the system's fault self diagnosis and closed-loop control logic.
Communicate with the main control module
Communicate with other components such as the main control board and I/O modules through TEL dedicated bus or industrial standard bus (such as RS-485, TTL);
Upload the collected data to the upper system for real-time monitoring or process adjustment.
2.产 品 展 示
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