Tokyo Electron 1B80-002787-11印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1B80-002787-11 印刷电路板（Printed Circuit Board，PCB） 是 Tokyo Electron 半导体设备中用于系统控制或信号管理的关键模块之一。以下是对其产品功能与应用领域的详细分析（无图案说明）：
一、基本信息
产品型号： 1B80-002787-11
产品名称： 印刷电路板（PCB）
制造商： Tokyo Electron Ltd.（TEL）
应用分类： 信号处理板 / 接口控制板 / 设备内部通信板（依据实际设备配置）
二、产品功能概述
内部电信号传输与分配
作为设备各功能模块间的桥梁，负责信号采集、调度与分发，保障系统逻辑正确运行。
提供稳定的信号路径，避免干扰，确保通信质量。
接口连接与数据通路
实现与上位主控板、传感器、驱动板等组件的连接；
可能包括数字/模拟信号输入输出、通讯接口（如RS-232、TTL等）。
元器件集成与功能逻辑执行
板上可能集成电源稳压芯片、逻辑门阵列、缓冲芯片、电感电容等，用于实现具体的电子控制功能或电气保护。
三、典型应用领域
该型号 PCB 多用于 Tokyo Electron 以下设备类型中：
等离子刻蚀设备（Etcher）
实现射频匹配、真空控制等功能所需的信号连接或辅助控制逻辑。
CVD / ALD 化学气相沉积设备
在沉积过程控制（如温度、气体通断、反应周期）中进行信号控制与反馈传输。
光刻设备辅助系统
控制曝光模块与对准系统的信号通信，或参与图像处理模块的接口处理。
清洗设备 / 输送机械系统
控制载片机构（wafer transfer）、夹具操作、气动元件等。
英文资料：
TEL Tokyo Electron 1B80-002787-11 Printed Circuit Board (PCB) is one of the key modules used for system control or signal management in Tokyo Electron semiconductor equipment. The following is a detailed analysis of its product functions and application areas (without graphic explanation):
1、 Basic Information
Product model: 1B80-002787-11
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Ltd. (TEL)
Application classification: Signal processing board/Interface control board/Device internal communication board (based on actual device configuration)
2、 Product Function Overview
Internal transmission and distribution of electrical signals
As a bridge between various functional modules of the device, responsible for signal acquisition, scheduling, and distribution, ensuring the correct operation of system logic.
Provide a stable signal path, avoid interference, and ensure communication quality.
Interface connection and data path
Connect with components such as the upper control board, sensors, and driver board;
This may include digital/analog signal input/output, communication interfaces (such as RS-232, TTL, etc.).
Component integration and functional logic execution
The board may integrate power regulator chips, logic gate arrays, buffer chips, inductors and capacitors, etc., to achieve specific electronic control functions or electrical protection.
3、 Typical application areas
This PCB model is commonly used in the following equipment types of Tokyo Electron:
Plasma etching equipment (Etcher)
The signal connection or auxiliary control logic required to achieve functions such as RF matching and vacuum control.
CVD/ALD chemical vapor deposition equipment
Signal control and feedback transmission are carried out in sedimentation process control (such as temperature, gas on/off, reaction cycle).
Lithography equipment auxiliary system
Control the signal communication between the exposure module and the alignment system, or participate in the interface processing of the image processing module.
Cleaning equipment/conveying machinery system
Control wafer transfer, fixture operation, pneumatic components, etc.
2.产 品 展 示
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