Tokyo Electron 3M87-021476-12燃气系统 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M87-021476-12 燃气系统 是东京电子（TEL）半导体制造设备中的关键子系统，负责控制和管理工艺所需各类气体的供应、流量调节和安全监测，保障生产过程的稳定性和安全性。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 燃气系统（Gas System） |
| 产品型号 | 3M87-021476-12 |
| 制造厂商 | Tokyo Electron Ltd.（东京电子） |
| 功能定位 | 气体供应、流量控制与安全监测 |
二、核心功能
气体供应管理
负责将高纯度工艺气体按要求输送至设备工艺腔体；
支持多种气体类型，如氮气、氢气、氩气等。
流量调节与控制
精确控制气体流量，确保工艺参数的稳定；
配备流量计、阀门和调节器实现自动调节。
安全保护机制
监测气体压力、泄漏与异常状态，保障设备和操作安全；
设有报警系统，及时响应紧急情况。
三、应用领域
半导体制造中的蚀刻、沉积、清洗等工艺气体管理；
工艺流程中的气体混合与分配控制；
设备整体安全系统的重要组成部分。
英文资料：
The TEL Tokyo Electron 3M87-021476-12 gas system is a key subsystem in the semiconductor manufacturing equipment of Tokyo Electronics (TEL), responsible for controlling and managing the supply, flow regulation, and safety monitoring of various gases required for the process, ensuring the stability and safety of the production process.
1、 Product Overview
Project Content
Product Name: Gas System
Product model 3M87-021476-12
Manufacturer Tokyo Electron Ltd
Functional positioning: gas supply, flow control, and safety monitoring
2、 Core functions
Gas supply management
Responsible for delivering high-purity process gas to the equipment process chamber as required;
Supports multiple gas types, such as nitrogen, hydrogen, argon, etc.
Flow regulation and control
Accurately control the gas flow rate to ensure the stability of process parameters;
Equipped with flow meters, valves, and regulators to achieve automatic adjustment.
Security protection mechanism
Monitor gas pressure, leaks, and abnormal conditions to ensure equipment and operational safety;
Equipped with an alarm system to promptly respond to emergency situations.
3、 Application Fields
Gas management for processes such as etching, deposition, and cleaning in semiconductor manufacturing;
Gas mixing and distribution control in the process flow;
An important component of the overall security system of the equipment.
2.产 品 展 示
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