Tokyo Electron 1981-600512-13分区监控板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1981-600512-13 分区监控板 是东京电子（TEL）半导体设备中用于对设备各个功能区域或工艺区域进行状态监控和管理的专用电子板，主要负责采集分区内传感器数据、监测设备运行状况，并向主控系统反馈实时信息。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 分区监控板（Zone Monitoring Board） |
| 产品型号 | 1981-600512-13 |
| 制造厂商 | Tokyo Electron Ltd.（东京电子） |
| 功能定位 | 区域状态监测与信号采集 |
二、核心功能
分区状态采集
负责采集设备指定分区内的温度、压力、流量、开关量等传感器信号；
实时监控该分区的工艺和设备运行状态。
信号处理与反馈
将采集到的模拟及数字信号处理后，转换成主控系统可识别的标准格式；
监测异常状态并可发出报警信号。
与主控系统通信
通过通信总线将分区信息传递至中央控制模块，支持集中监控与远程管理。
英文资料：
The TEL Tokyo Electron 1981-600512-13 partition monitoring board is a specialized electronic board used in Tokyo Electronics (TEL) semiconductor equipment to monitor and manage the status of various functional or process areas of the equipment. It is mainly responsible for collecting sensor data within the partition, monitoring the operation status of the equipment, and providing real-time information feedback to the main control system.
1、 Product Overview
Project Content
Product Name: Zone Monitoring Board
Product model 1981-600512-13
Manufacturer Tokyo Electron Ltd
Functional positioning area status monitoring and signal acquisition
2、 Core functions
Partition status collection
Responsible for collecting sensor signals such as temperature, pressure, flow rate, and switch quantity within the designated partition of the equipment;
Real time monitoring of the process and equipment operation status of the partition.
Signal Processing and Feedback
After processing the collected analog and digital signals, convert them into a standard format recognizable by the main control system;
Monitor abnormal states and issue alarm signals.
Communicate with the main control system
The partition information is transmitted to the central control module through the communication bus, supporting centralized monitoring and remote management.
2.产 品 展 示
3.其他产品
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