Tokyo Electron 381-600316-3驱动板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-600316-3 驱动板 是东京电子（TEL）半导体制造设备中的关键执行控制模块，主要负责驱动和控制设备中的电机、阀门等执行机构，实现精准动作和工艺流程的自动化控制。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 驱动板（Driver Board） |
| 产品型号 | 381-600316-3 |
| 制造商 | Tokyo Electron Ltd.（东京电子） |
| 功能定位 | 电机及执行机构驱动与控制 |
二、核心功能
执行机构驱动
控制步进电机、伺服电机或直流电机的启动、停止、速度及位置；
驱动电磁阀、继电器等开关类执行元件。
信号转换与放大
将控制系统输出的低电平信号放大为执行元件所需的驱动电流和电压；
提供电气隔离，保护控制系统免受电流冲击。
反馈监测
支持传感器信号反馈，监测驱动状态和故障，保障动作准确可靠。
三、典型应用场景
半导体设备中各类机械部件的驱动控制，如晶圆搬运机械臂、电机驱动轴、气动阀门控制等。
自动化工艺流程中，执行精准动作控制的关键部件。
英文资料：
The TEL Tokyo Electron 381-600316-3 driver board is a key execution control module in the semiconductor manufacturing equipment of Tokyo Electronics (TEL). It is mainly responsible for driving and controlling the actuators such as motors and valves in the equipment, achieving precise action and automated control of the process flow.
1、 Product Overview
Project Content
Product Name: Driver Board
Product model 381-600316-3
Manufacturer Tokyo Electron Ltd
Functional positioning motor and actuator drive and control
2、 Core functions
Execution mechanism driver
Control the start, stop, speed, and position of stepper motors, servo motors, or DC motors;
Drive switch actuators such as solenoid valves and relays.
Signal conversion and amplification
Amplify the low-level signal output by the control system into the driving current and voltage required by the actuator;
Provide electrical isolation to protect the control system from current surges.
Feedback monitoring
Support sensor signal feedback, monitor drive status and faults, and ensure accurate and reliable actions.
3、 Typical application scenarios
Drive control of various mechanical components in semiconductor equipment, such as wafer handling robotic arms, motor drive shafts, pneumatic valve control, etc.
The key component that executes precise action control in automated process flow.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA SNAT7600 driver control circuit board
ABB 3DDE300417 Input/Output Board
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