Tokyo Electron 3M80-001607-15处理器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M80-001607-15 处理器模块 是东京电子（TEL）半导体制造设备中的核心计算与控制单元，负责执行设备的主控制算法、数据处理和系统协调，确保各工艺单元按预定程序精准运行。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 处理器模块（Processor Module） |
| 产品型号 | 3M80-001607-15 |
| 制造商 | Tokyo Electron Ltd.（东京电子） |
| 功能定位 | 中央处理与控制核心 |
二、核心功能
中央计算控制
搭载工业级CPU或FPGA，负责执行设备控制程序与数据运算；
管理温控、压力、流量等工艺参数的实时监控与调整。
多任务协调
支持多线程或多进程控制，实现设备各子系统同步协作；
处理传感器输入、执行器输出及通信协议，保持工艺连贯。
通信与接口管理
通过多种工业通信接口（如Ethernet、RS-232/485、CAN等）与外围设备和上位系统交互；
支持与I/O模块、传感器及执行机构的高速数据交换。
三、典型应用领域
半导体制造设备的中央控制单元，如涂胶显影机、蚀刻机、清洗设备等。
工艺流程自动化控制和数据采集处理。
设备状态监测与故障诊断支持。
英文资料：
The TEL Tokyo Electron 3M80-001607-15 processor module is the core computing and control unit in Tokyo Electronics (TEL) semiconductor manufacturing equipment, responsible for executing the main control algorithms, data processing, and system coordination of the equipment, ensuring that each process unit operates accurately according to predetermined programs.
1、 Product Overview
Project Content
Product Name: Processor Module
Product model 3M80-001607-15
Manufacturer Tokyo Electron Ltd
Functional positioning: Central processing and control core
2、 Core functions
Central computing control
Equipped with industrial grade CPU or FPGA, responsible for executing device control programs and data operations;
Real time monitoring and adjustment of process parameters such as temperature control, pressure, and flow rate management.
Multi task coordination
Support multi-threaded or multi process control to achieve synchronous collaboration among various subsystems of the device;
Process sensor inputs, actuator outputs, and communication protocols to maintain process coherence.
Communication and Interface Management
Interact with peripheral devices and upper level systems through various industrial communication interfaces such as Ethernet, RS-232/485, CAN, etc;
Support high-speed data exchange with I/O modules, sensors, and actuators.
3、 Typical application areas
The central control unit of semiconductor manufacturing equipment, such as coating and developing machines, etching machines, cleaning equipment, etc.
Process automation control and data acquisition and processing.
Equipment status monitoring and fault diagnosis support.
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB XVC768117 Field Input/Output Module
Asea 2668 170-3 Pcb Circuit Board
| RAIC400 | SC403-001-T4 | SC104-001 |
| R8AHENA-R2-NS-NV-00 | SC103-001 | S33HNNA-RNNM-00 |
| R8AGENA-R2-NS-NV-00 | SC101-001-T4 | S31GMNH-RNNE-00 |
| R8AFENA-R4-NS-NV-02 | SC322A-001-01 | S34GNNA-RNNM-00 |
| R88SENA-R2-NS-NV-03 | SC323A-024 | S32HNBA-RNVM-00 |
| R88HENA-R2-NS-NV-00 | SC403-017-T4 | SC102-001-T3 |
