Tokyo Electron 3208-000171-13控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3208-000171-13 控制器模块 是一款专用于东京电子（TEL）半导体制造设备的嵌入式控制核心部件，主要用于管理、协调设备中各子系统的运行逻辑，执行工艺流程控制、数据采集处理及通信调度等关键功能，是整台设备的大脑之一。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 控制器模块（Controller Module） |
| 产品型号 | 3208-000171-13 |
| 制造厂商 | Tokyo Electron Ltd.（东京电子） |
| 功能类型 | 中央逻辑控制与任务调度 |
二、核心功能
主控逻辑处理
内嵌工业级 CPU 或 FPGA 控制单元，负责运行设备主控程序；
管理温度控制、压力调节、传感器采集、动作逻辑等系统任务。
数据采集与通讯接口
与模拟输入模块、数字输出模块、IO板、PLC子系统等进行多通道信号交互；
支持TEL设备内部通信协议及外部接口（可能包括RS-232/485、Ethernet、CAN等）。
工艺流程管理
执行预设工艺流程顺序，确保设备各阶段动作精准衔接；
支持参数化设置、自动化控制、异常检测与报警响应。
三、典型应用领域
涂胶显影设备（Coater/Developer）
控制涂胶旋转速度、臂机构移动、显影液输送、加热/冷却等动作。
蚀刻与沉积设备（Etcher/CVD/ALD）
管理气体流程、等离子功率、温控系统与真空腔体的联动逻辑。
晶圆搬运系统
协调真空腔门、机械臂、升降平台等动作，实现晶圆从一个工艺单元精准转移到下一个。
英文资料：
The TEL Tokyo Electron 3208-000171-13 controller module is an embedded control core component specifically designed for Tokyo Electronics (TEL) semiconductor manufacturing equipment. It is mainly used to manage and coordinate the operational logic of various subsystems in the equipment, perform key functions such as process flow control, data acquisition and processing, and communication scheduling. It is one of the brains of the entire equipment.
1、 Product Overview
Project Content
Product Name Controller Module
Product model 3208-000171-13
Manufacturer Tokyo Electron Ltd
Function type: Central logic control and task scheduling
2、 Core functions
Main control logic processing
Embedded industrial grade CPU or FPGA control unit, responsible for running the main control program of the equipment;
Manage system tasks such as temperature control, pressure regulation, sensor acquisition, and action logic.
Data collection and communication interface
Multi channel signal interaction with analog input modules, digital output modules, IO boards, PLC subsystems, etc;
Supports internal communication protocols and external interfaces of TEL devices (which may include RS-232/485, Ethernet, CAN, etc.).
Process management
Execute the preset process sequence to ensure precise connection of equipment actions in each stage;
Support parameterized settings, automated control, anomaly detection, and alarm response.
3、 Typical application areas
Coater/Developer
Control the rotation speed of the glue coating, the movement of the arm mechanism, the transportation of the developer solution, heating/cooling, and other actions.
Etching and deposition equipment (Etcher/CVD/ALD)
Manage the linkage logic between gas processes, plasma power, temperature control systems, and vacuum chambers.
Wafer handling system
Coordinate the actions of vacuum chamber doors, robotic arms, lifting platforms, etc., to achieve precise transfer of wafers from one process unit to the next.
2.产 品 展 示
3.其他产品
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