Tokyo Electron 3M80-002733-11保险丝模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3M80-002733-11 保险丝模块 是一款专用于半导体制造设备的电路保护单元，属于东京电子（TEL）设备中的标准安全模块，主要用于对控制系统、电源系统或信号通道中的关键电路提供过流保护，防止异常电流损坏元件或引发设备故障。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 保险丝模块（Fuse Module） |
| 产品型号 | 3M80-002733-11 |
| 所属品牌 | Tokyo Electron Ltd.（东京电子） |
| 应用类别 | 电气保护模块，过流保护 |
二、核心功能
电路过流保护
对电源供给线或控制线路进行实时电流限制；
在过载或短路发生时自动熔断保险丝，切断故障电路。
独立保险丝分区
模块内部通常包含多个保险丝座位，可保护多个子电路；
每个保险丝通道可独立替换，方便维护。
配合主控系统联动
某些型号可能配备保险丝熔断检测功能，可向主控制系统反馈状态信号；
便于故障快速定位与系统报警联动。
三、典型应用领域
晶圆处理设备内部电源保护
用于涂胶显影设备、蚀刻机、清洗机等控制电路、电机驱动电路的安全隔离。
自动化控制系统分段电路保护
各模块的控制板、电磁阀、传感器等部件的专用电流保护点。
高可靠性工业设备
符合洁净室与高稳定性需求，适用于需要长期连续运行的生产系统。
英文资料：
The TEL Tokyo Electron 3M80-002733-11 fuse module is a circuit protection unit specifically designed for semiconductor manufacturing equipment. It is a standard safety module in Tokyo Electronics (TEL) equipment and is mainly used to provide overcurrent protection for critical circuits in control systems, power systems, or signal channels, preventing abnormal currents from damaging components or causing equipment failures.
1、 Product Overview
Project Content
Product Name Fuse Module
Product model 3M80-002733-11
Belonging to Tokyo Electron Ltd
Application category: Electrical protection module, overcurrent protection
2、 Core functions
Circuit overcurrent protection
Real time current limitation on power supply lines or control lines;
Automatically blow the fuse when overload or short circuit occurs, cutting off the faulty circuit.
Independent fuse partition
The module usually contains multiple fuse seats inside, which can protect multiple sub circuits;
Each fuse channel can be independently replaced for easy maintenance.
Cooperate with the main control system linkage
Some models may be equipped with fuse breakage detection function, which can provide feedback status signals to the main control system;
Facilitate quick fault location and system alarm linkage.
3、 Typical application areas
Internal power protection for wafer processing equipment
Used for safe isolation of control circuits and motor drive circuits in coating and developing equipment, etching machines, cleaning machines, etc.
Automated control system segmented circuit protection
Special current protection points for control boards, solenoid valves, sensors, and other components of each module.
High reliability industrial equipment
Meets the requirements of clean rooms and high stability, suitable for production systems that require long-term continuous operation.
2.产 品 展 示
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