Tokyo Electron 2L81-050097-13印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2L81-050097-13 印刷电路板 是一块专用于东京电子（TEL）半导体制造设备中的功能性 PCB 板卡，主要用于信号传输、控制逻辑执行、或与执行模块的通信连接。该板卡为设备控制系统中的重要组成部分，具备高度集成性与稳定性，常见于自动化系统、真空处理单元或工艺控制模块内部。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品型号 | 2L81-050097-13 |
| 产品名称 | 印刷电路板（Printed Circuit Board） |
| 制造厂商 | Tokyo Electron Ltd.（东京电子） |
| 应用类型 | 控制、通信、信号中继 |
二、核心功能
信号连接与中转
用于主控系统与下级执行机构之间的信号桥接；
支持多通道输入输出接口，连接传感器、阀门、驱动器等设备组件。
控制逻辑处理
集成基础逻辑电路或通信芯片，用于执行特定控制任务；
可能包括数字信号采集、模拟信号转换、逻辑判断等功能。
系统通信接口
实现与其他控制模块或上位机的数据通信；
支持TEL设备内部的标准数据协议或定制通信架构。
三、典型应用场景
晶圆处理设备内部控制系统
应用于TEL的涂胶显影、蚀刻、清洗或热处理设备中，作为功能模块板卡；
与主控板或其他子模块配合，完成特定的控制任务或信号传递。
自动化控制系统子模块
用于电机驱动控制、压力/温度调节单元、真空阀门控制系统等；
支持自动化工艺过程中的各类子系统稳定运行。
设备维修与替换
作为标准模块化组件，可在设备维护或升级过程中进行替换；
保证老旧设备运行持续性与控制系统一致性。
英文资料：
The TEL Tokyo Electron 2L81-050097-13 printed circuit board is a functional PCB board specifically designed for use in Tokyo Electronics (TEL) semiconductor manufacturing equipment. It is primarily used for signal transmission, control logic execution, or communication connections with execution modules. This board is an important component of the equipment control system, with high integration and stability. It is commonly used in automation systems, vacuum processing units, or process control modules.
1、 Basic Product Information
Project Content
Product model 2L81-050097-13
Product Name Printed Circuit Board
Manufacturer Tokyo Electron Ltd
Application type control, communication, signal relay
2、 Core functions
Signal connection and relay
Used for signal bridging between the main control system and subordinate executing agencies;
Supports multi-channel input/output interfaces, connecting components such as sensors, valves, drivers, etc.
Control logic processing
Integrate basic logic circuits or communication chips for executing specific control tasks;
It may include functions such as digital signal acquisition, analog signal conversion, and logic judgment.
System communication interface
Realize data communication with other control modules or upper computer;
Support standard data protocols or customized communication architectures within TEL devices.
3、 Typical application scenarios
Internal control system of wafer processing equipment
Applied in TEL's adhesive development, etching, cleaning, or heat treatment equipment as a functional module board;
Cooperate with the main control board or other sub modules to complete specific control tasks or signal transmission.
Automation control system submodule
Used for motor drive control, pressure/temperature regulation units, vacuum valve control systems, etc;
Support stable operation of various subsystems in automated process.
Equipment maintenance and replacement
As a standard modular component, it can be replaced during equipment maintenance or upgrade processes;
Ensure the continuity of operation of old equipment and consistency with control systems.
2.产 品 展 示
3.其他产品
4.其他英文产品
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| SR469-P5-HI-A20-E-H | AMAT 0100-A0491 | PFCL 301E-0.2 |
| SR469-P5-HI-A20-E | AMAT 0100-13025 | DSRC 113 ABB |
| SR469-P5-HI-A20 | AMAT 0100-76109 | PFCL 301E-1.0KN |
| SR469-P1-HI-A1-E-H | AMAT 0100-02195 | 5716075-K DSDX451 ABB |
| SR469-P1-HI-A1-E | AMAT 0100-90517 | PFEA 113-65.1PXV |
| SR3720-3798-7-56C | AMAT 0100-93404 | PFCL 201CD-20.0KN |
| SR3720-3798-2A-56C | AMAT 0110-20001 | 57160001-UH DSTD150A ABB |
