Tokyo Electron 3381-001036-11照明控制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3381-001036-11 照明控制板 是东京电子（Tokyo Electron）半导体制造设备中的专用电子模块，主要负责设备内部照明系统的电源管理与控制，确保工作环境照明的稳定与安全。
一、产品简介
产品型号：3381-001036-11
产品名称：照明控制板（Lighting Control Board）
功能定位：管理和控制设备内部及工作区的照明设备
应用范围：广泛应用于TEL晶圆制造设备及相关工艺平台
二、主要功能
照明电源控制
为设备内部的照明灯具提供稳定的电源供应；
控制照明的开关、亮度调节等功能。
信号接口管理
接收来自主控制系统的照明控制指令，实现自动化照明管理；
反馈照明状态信息至控制系统。
安全保护
具备过流、短路保护功能，保障照明系统和主控板的安全；
防止因电压波动造成的设备损坏。
三、应用领域
半导体制造设备照明
如涂胶显影机、蚀刻设备等关键工艺设备的内部及工作区域照明；洁净室环境照明管理
支持洁净室内严格的照明控制需求，配合设备运行环境标准；设备维护与升级
作为易损耗件，定期更换照明控制板可保证设备正常照明功能。
英文资料：
The TEL Tokyo Electron 3381-001036-11 lighting control board is a specialized electronic module in Tokyo Electron's semiconductor manufacturing equipment, mainly responsible for power management and control of the internal lighting system of the equipment, ensuring the stability and safety of the working environment lighting.
Brief introduction
Product model: 3381-001036-11
Product Name: Lighting Control Board
Functional positioning: Manage and control lighting equipment inside devices and work areas
Application scope: Widely used in TEL wafer manufacturing equipment and related process platforms
2、 Main functions
Lighting power control
Provide stable power supply for the lighting fixtures inside the equipment;
Control lighting switches, brightness adjustment, and other functions.
Signal interface management
Receive lighting control instructions from the main control system to achieve automated lighting management;
Feedback lighting status information to the control system.
Safety protection
Equipped with overcurrent and short-circuit protection functions to ensure the safety of the lighting system and main control board;
Prevent equipment damage caused by voltage fluctuations.
3、 Application Fields
Semiconductor manufacturing equipment lighting
Lighting for the interior and working areas of key process equipment such as coating and developing machines, etching equipment, etc;
Cleanroom environment lighting management
Support strict lighting control requirements in clean rooms and comply with equipment operating environment standards;
Equipment maintenance and upgrade
As a consumable part, regularly replacing the lighting control board can ensure the normal lighting function of the equipment.
2.产 品 展 示
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