Tokyo Electron 2184-020028-12模拟输入电子模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2184-020028-12 模拟输入电子模块 是东京电子公司用于半导体制造设备中的一种功能性电子模块，专门用于采集来自设备内部传感器或工艺控制系统的模拟信号（Analog Input），并将其转换为可供主控系统处理的标准信号格式，是晶圆制造设备控制链中的关键一环。
一、产品基本信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 模拟输入电子模块 |
| 型号 | 2184-020028-12 |
| 所属系统 | Tokyo Electron 半导体设备 |
| 功能类型 | 模拟信号采集与输入接口 |
二、主要功能
模拟信号采集
接收来自温度传感器、压力传感器、气体流量计、位置反馈器等设备的连续模拟电信号（如0–5V、0–10V、4–20mA等）；
模块内部具备A/D转换功能，将模拟信号数字化，以供控制系统进一步处理。
信号隔离与稳定输入
具备电气隔离能力，有效避免外部信号干扰影响主控系统；
提高系统整体抗噪能力和运行稳定性。
数据上传与工艺控制支持
将采集到的参数实时上传至主控制单元，用于闭环控制逻辑；
可用于联动执行机构实现动态工艺调整，如温控反馈、流量调节等。
三、应用领域
半导体前道工艺设备
应用于TEL晶圆制造设备如涂胶显影设备（Clean Track）、蚀刻机（Etcher）、清洗设备等；
采集工艺关键变量用于实时监测与控制。
环境参数采集系统
安装于真空腔体、加热平台、气体供应单元等设备部位；
实时采集温度、压力、气体流量等模拟量信息。
设备维护与诊断
工程师可通过该模块获取详细工艺参数，进行设备诊断与调试；
模块损坏或老化时，可更换以恢复信号链路功能。
英文资料：
TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module is a functional electronic module used by Tokyo Electronics Corporation in semiconductor manufacturing equipment. It is specifically designed to collect analog signals (Analog Input) from internal sensors or process control systems of the equipment, and convert them into a standard signal format that can be processed by the main control system. It is a key link in the control chain of wafer manufacturing equipment.
1、 Basic Product Information
Project Content
Product Name Analog Input Electronic Module
Model 2184-020228-12
Tokyo Electron Semiconductor Equipment System
Function type: Analog signal acquisition and input interface
2、 Main functions
Analog signal acquisition
Receive continuous analog electrical signals (such as 0-5V, 0-10V, 4-20mA, etc.) from temperature sensors, pressure sensors, gas flow meters, position feedback devices, and other equipment;
The module has an A/D conversion function inside, which digitizes analog signals for further processing by the control system.
Signal isolation and stable input
Capable of electrical isolation, effectively avoiding external signal interference affecting the main control system;
Improve the overall noise resistance and operational stability of the system.
Data upload and process control support
Upload the collected parameters in real-time to the main control unit for closed-loop control logic;
It can be used for dynamic process adjustment of linked actuators, such as temperature control feedback, flow regulation, etc.
3、 Application Fields
Semiconductor front-end process equipment
Applied to TEL wafer manufacturing equipment such as coating and developing equipment (Clean Track), etching machines (Etcher), cleaning equipment, etc;
Collect key process variables for real-time monitoring and control.
Environmental parameter collection system
Installed in equipment parts such as vacuum chambers, heating platforms, gas supply units, etc;
Real time collection of analog information such as temperature, pressure, and gas flow rate.
Equipment maintenance and diagnosis
Engineers can obtain detailed process parameters through this module for equipment diagnosis and debugging;
When the module is damaged or aged, it can be replaced to restore the signal link function.
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-11415 Digital Input Module
| VT-11013-12 | 6DD1682-0BB1 | ICS Triplex T6100 |
| VT 5006 SIX / R5. | 6DD1682-0AJ1 | ICS Triplex T6100C |
| VT 3002-1-2X/48F | 6DD1681-0GA0 | ics triplex T7150a |
| VC3640-450-1-56C | SC453-017-05 | ics triplex t7310 |
| VC3640-449-1-48C | SC452-017-05 | SC953TN-501-01 |
| VC3640-419-1-56C | SC453-037-15 | SC903-050-01 |
| VC3640-405-1-56D | SC453-011-05 | SC933AN-001-01 |
