Tokyo Electron 2LB1-050065-V1印刷电路板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
一、产品简介
TEL 2LB1-050065-V1 印刷电路板 是东京电子(Tokyo Electron)用于半导体制造设备中的专用控制板卡,归属于其信号处理与设备控制模块系列。该电路板通常用于射频(RF)系统、泵控系统或真空工艺控制单元中,负责采集、处理和转发设备运行所需的各种模拟或数字信号。
二、主要功能
信号控制与分配
该电路板具备多通道信号输入输出功能,能够将主控系统发出的控制指令转换为可用于具体执行部件的电信号;
同时也能采集传感器反馈的数据,上送至中央处理单元。
处理器/控制器接口支持
作为一块处理器附属控制板,常见于设备内部的RF泵控系统或工艺处理控制区,用于协调主控与各类外设之间的通讯。
电气隔离与抗干扰能力
板上具备基础的电气隔离、防浪涌、抗干扰设计,适合在半导体工艺设备中运行,面对电磁干扰、温湿波动等复杂环境。
三、应用领域
半导体设备控制系统
应用于TEL的涂胶显影设备、蚀刻设备或真空处理系统中,控制如射频泵、真空阀、电源模块等设备的启停、运行状态和反馈采集。
自动化执行系统
用于自动机械执行器(如电机、气动驱动单元)的信号发出与反馈读取。
设备维护与替换模块
常用于原始电路板损坏时的替换,确保设备连续稳定运行;
也适用于旧设备的技术支持、二次使用与工厂升级改造。
英文资料:
Brief introduction
TEL 2LB1-050065-V1 printed circuit board is a dedicated control board used by Tokyo Electron in semiconductor manufacturing equipment, belonging to its signal processing and equipment control module series. This circuit board is typically used in radio frequency (RF) systems, pump control systems, or vacuum process control units, responsible for collecting, processing, and forwarding various analog or digital signals required for equipment operation.
2、 Main functions
Signal Control and Distribution
This circuit board has multi-channel signal input and output functions, which can convert control instructions issued by the main control system into electrical signals that can be used for specific execution components;
At the same time, it can also collect data feedback from sensors and send it to the central processing unit.
Processor/controller interface support
As a processor accessory control board, it is commonly used in the RF pump control system or process control area inside the device to coordinate communication between the main control and various peripherals.
Electrical isolation and anti-interference capability
The board has basic electrical isolation, surge protection, and anti-interference design, suitable for operation in semiconductor process equipment, facing complex environments such as electromagnetic interference and temperature and humidity fluctuations.
3、 Application Fields
Semiconductor equipment control system
Applied to TEL's coating and developing equipment, etching equipment, or vacuum processing systems, it controls the start stop, operation status, and feedback collection of equipment such as RF pumps, vacuum valves, power modules, etc.
Automated Execution System
Used for signal transmission and feedback reading of automatic mechanical actuators (such as motors and pneumatic drive units).
Equipment maintenance and replacement module
Commonly used for replacing damaged original circuit boards to ensure continuous and stable operation of equipment;
It is also applicable to technical support, secondary use, and factory upgrade and renovation of old equipment.
2.产 品 展 示
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