Tokyo Electron 1187-093732-11控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：1187-093732-11 控制器模块
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：控制器模块（Controller Module）
一、产品概述
1187-093732-11 是 Tokyo Electron 半导体设备中用于实现设备自动化控制的专用控制器模块。该模块负责对设备内部某一功能子系统的控制逻辑处理、信号管理以及执行器驱动，是保障设备稳定高效运行的关键部件。
二、主要功能
自动控制逻辑执行
运行设备工艺控制程序，实现动作指令的调度与执行。
信号采集与处理
接收多路传感器输入信号，进行处理并反馈控制命令。
执行器驱动
控制电磁阀、步进电机、加热器等执行部件，实现精确控制。
通信接口
支持与主控制器、上位机系统的通信，进行数据交换和状态报告。
故障检测与保护
具备异常检测及报警输出功能，提高设备安全性。
三、典型应用
该控制器模块广泛应用于 Tokyo Electron 的以下设备或子系统中：
Etcher（蚀刻机）
CVD / PVD 薄膜沉积设备
Coater / Developer 涂胶显影系统
搬运系统及真空控制单元
四、技术参数（参考同类模块特性）
| 参数类别 | 说明 |
|---|---|
| 控制芯片 | 工业级 MCU / FPGA |
| 输入输出接口 | 多路数字量输入/输出，模拟量接口 |
| 电源需求 | 24V DC，具备过压、短路保护 |
| 通信协议 | RS-232、RS-485、以太网或专用总线 |
| 安装方式 | 插槽式或螺丝固定，适合机架或机箱安装 |
| 环境适应性 | 抗干扰设计，适用于洁净室及工业环境 |
英文资料：
Product Name: 1187-093732-11 Controller Module
Manufacturer: Tokyo Electron Ltd
Product type: Controller Module
1、 Product Overview
1187-093732-11 is a dedicated controller module used in Tokyo Electron semiconductor equipment to achieve equipment automation control. This module is responsible for the control logic processing, signal management, and actuator driving of a certain functional subsystem within the device, and is a key component to ensure the stable and efficient operation of the device.
2、 Main functions
Automatic control logic execution
Run the equipment process control program to schedule and execute action instructions.
Signal acquisition and processing
Receive multiple sensor input signals, process them, and provide feedback control commands.
Actuator driver
Control the execution components such as solenoid valves, stepper motors, heaters, etc. to achieve precise control.
communication interface
Support communication with the main controller and upper computer system for data exchange and status reporting.
Fault detection and protection
Equipped with anomaly detection and alarm output functions to improve equipment safety.
3、 Typical applications
This controller module is widely used in the following devices or subsystems of Tokyo Electron:
Etcher (etching machine)
CVD/PVD thin film deposition equipment
Coater/Developer coating and developing system
Handling system and vacuum control unit
4、 Technical parameters (refer to the characteristics of similar modules)
Parameter category description
Control chip industrial grade MCU/FPGA
Input/output interface with multiple digital inputs/outputs, analog interface
Power requirement 24V DC, with overvoltage and short-circuit protection
Communication protocols RS-232, RS-485, Ethernet or dedicated bus
Installation method: slot type or screw fixed, suitable for rack or chassis installation
Environmental adaptability and anti-interference design, suitable for clean rooms and industrial environments
2.产 品 展 示
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