Tokyo Electron 049-001007-1防爆模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：049-001007-1 防爆模块
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：防爆控制模块（Explosion-Proof Module / Intrinsic Safety Barrier）
一、产品概述
049-001007-1 防爆模块 是用于 Tokyo Electron 半导体设备中的本质安全型电气隔离模块，用于在特定存在可燃性气体或危险工艺气体的环境下，保障电气控制系统的运行安全。其功能是在系统中提供电气隔离、防止电火花、控制短路能量，符合防爆或本质安全规范。
二、核心功能
电气隔离保护
对控制信号、电源或传感器线路进行电隔离，防止高能量干扰或短路传播到危险区域。
限制电能输出
限制通过模块传送到现场设备的电压、电流，使其低于引爆能量，防止因故障引起火花或过热。
故障安全
模块在发生短路、过压等异常时会自动断开或限流，确保系统运行不会引起可燃气体爆炸。
符合防爆认证（如适用）
符合 IECEx、ATEX、NEC 或其他相关防爆标准要求（取决于实际使用环境与设备级别）。
三、典型应用场景
此模块通常用于以下 TEL 设备或工艺环境中涉及危险气体的区域：
CVD（化学气相沉积）系统中的毒性/可燃气体控制单元
Etcher 系统涉及 SF₆、Cl₂、HBr 等气体的接口回路
设备真空泵控制单元、排气处理系统
气体供应面板（GAS BOX）、质量流量控制系统（MFC）接口
洁净室中特殊工艺区，具有潜在爆炸风险的控制节点
英文资料：
Product Name: 049-0001007-1 Explosion proof Module
Manufacturer: Tokyo Electron Ltd
Product type: Explosion Proof Module/Intrinsic Safety Barrier
1、 Product Overview
The explosion-proof module 049-0001007-1 is an intrinsic safety electrical isolation module used in Tokyo Electron semiconductor equipment to ensure the safe operation of electrical control systems in specific environments containing flammable gases or hazardous process gases. Its function is to provide electrical isolation, prevent electric sparks, control short-circuit energy in the system, and comply with explosion-proof or intrinsic safety regulations.
2、 Core functions
Electrical isolation protection
Electrical isolation of control signals, power or sensor circuits to prevent high-energy interference or short circuits from spreading to hazardous areas.
Limit electrical energy output
Limit the voltage and current transmitted to the on-site equipment through the module to below the detonation energy, to prevent sparks or overheating caused by faults.
fail safe
The module will automatically disconnect or limit the current in case of short circuit, overvoltage and other abnormalities, ensuring that the system operation will not cause flammable gas explosion.
Compliant with explosion-proof certification (if applicable)
Compliant with IECEx, ATEX, NEC or other relevant explosion-proof standards (depending on the actual usage environment and equipment level).
3、 Typical application scenarios
This module is typically used in areas involving hazardous gases in the following TEL equipment or process environments:
Toxic/Combustible Gas Control Unit in CVD (Chemical Vapor Deposition) System
The Etcher system involves interface circuits for gases such as SF ₆, Cl ₂, HBr, etc
Equipment vacuum pump control unit, exhaust treatment system
Gas supply panel (GAS BOX), mass flow control system (MFC) interface
Control nodes with potential explosion risks in special process areas of clean rooms
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