Tokyo Electron 3R81-000037-1单板计算机 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：3R81-000037-1 单板计算机（Single Board Computer, SBC）
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：工业级单板计算机（工业控制核心板）
一、产品概述
3R81-000037-1 是 Tokyo Electron（TEL）半导体设备中使用的一款 工业级嵌入式单板计算机（SBC），用于执行本地逻辑控制、设备数据处理、人机交互接口驱动等任务，是设备控制系统的核心处理单元之一。
二、核心功能
本地处理与控制
运行嵌入式操作系统（如嵌入式 Linux 或 VxWorks）或实时控制程序，执行工艺控制逻辑。
多种通信接口
提供串口（RS-232/485）、USB、以太网、TTL、GPIO 等多种通信接口，用于与 PLC、I/O 板、执行器或传感器连接。
设备数据采集与运算
采集并处理来自现场设备的数据（如温度、真空、流量、位置），完成工艺参数调节或记录。
系统管理与诊断
支持自检功能、异常日志记录、状态 LED 指示，有助于故障定位和维护。
三、典型应用范围
3R81-000037-1 单板计算机 适用于 Tokyo Electron 以下设备系统中担任控制核心角色：
蚀刻设备（Etcher）主控制单元
CVD/PVD 薄膜沉积系统主控处理板
晶圆搬送系统、对位系统
真空控制子系统
Coater/Developer 中数据采集与反馈处理模块
英文资料：
Product Name: 3R81-000037-1 Single Board Computer (SBC)
Manufacturer: Tokyo Electron Ltd
Product Type: Industrial Single Board Computer (Industrial Control Core Board)
1、 Product Overview
3R81-000037-1 is an industrial grade embedded single board computer (SBC) used in Tokyo Electron (TEL) semiconductor equipment to perform tasks such as local logic control, device data processing, and human-computer interaction interface drivers. It is one of the core processing units of the equipment control system.
2、 Core functions
Local processing and control
Run embedded operating systems (such as embedded Linux or VxWorks) or real-time control programs to execute process control logic.
Multiple communication interfaces
Provide multiple communication interfaces such as serial port (RS-232/485), USB, Ethernet, TTL, GPIO, etc., for connecting with PLCs, I/O boards, actuators, or sensors.
Equipment data collection and computation
Collect and process data from on-site equipment (such as temperature, vacuum, flow rate, position) to adjust or record process parameters.
System Management and Diagnosis
Support self checking function, abnormal log recording, and status LED indication, which helps with fault location and maintenance.
3、 Typical application scope
3R81-000037-1 single board computer is suitable for serving as the control core role in the following equipment systems of Tokyo Electron:
Etcher main control unit
CVD/PVD thin film deposition system main control processing board
Wafer transfer system, alignment system
Vacuum control subsystem
Data Collection and Feedback Processing Module in Coater/Developer
2.产 品 展 示
3.其他产品
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