Tokyo Electron 1181-000253-1B控制 PCB 卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：1181-000253-1B 控制 PCB 卡
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：控制印刷电路板（Control PCB Card）
一、产品概述
1181-000253-1B 是 Tokyo Electron 半导体设备中用于模块级控制功能的专用 控制 PCB（Printed Circuit Board）卡件，用于实现逻辑控制、信号管理、电源调配或接口通信等功能。它通常作为设备子系统（如真空、加热、搬运等）的控制核心模块存在。
二、主要功能
逻辑控制与执行
搭载控制芯片（如 MCU、FPGA 或 CPLD），根据工艺程序执行预设动作。
I/O 信号处理
接收传感器、开关等输入信号，输出控制命令至执行器（如电磁阀、电机、加热器）。
通信接口转换
支持与主控系统之间的通信，如串口、TTL、I²C、CAN 或 TEL 自有协议。
电源调节与保护
板载电源稳压模块或滤波单元，确保各部件稳定供电。
三、适用设备系统（典型应用）
该卡件广泛用于以下 Tokyo Electron 设备的关键控制子模块中：
Etcher 蚀刻设备
CVD/PVD 薄膜沉积系统
Coater/Developer 涂胶显影设备
机器人搬运系统（如晶圆搬送、升降平台等）
腔体控制单元或气体分配系统
英文资料：
Product Name: 1181-000253-1B Control PCB Card
Manufacturer: Tokyo Electron Ltd
Product type: Control PCB Card
1、 Product Overview
1181-000253-1B is a dedicated control PCB (Printed Circuit Board) card used for module level control functions in Tokyo Electron semiconductor equipment, which is used to implement functions such as logic control, signal management, power allocation, or interface communication. It usually exists as the control core module of equipment subsystems such as vacuum, heating, handling, etc.
2、 Main functions
Logic Control and Execution
Equipped with control chips (such as MCU, FPGA or CPLD), execute preset actions according to the process program.
I/O signal processing
Receive input signals from sensors, switches, etc., and output control commands to actuators (such as solenoid valves, motors, heaters).
Communication interface conversion
Support communication with the main control system, such as serial port, TTL, I ² C, CAN, or TEL proprietary protocols.
Power regulation and protection
Onboard power supply stabilizing module or filtering unit ensures stable power supply to all components.
3、 Applicable equipment system (typical application)
This card is widely used in the key control submodules of the following Tokyo Electron devices:
Etcher etching equipment
CVD/PVD thin film deposition system
Coater/Developer coating and developing equipment
Robot handling systems (such as wafer handling, lifting platforms, etc.)
Chamber control unit or gas distribution system
2.产 品 展 示
3.其他产品
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