Tokyo Electron FPC-T0097A-11风扇控制模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：FPC-T0097A-11 风扇控制模块
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：风扇控制模块（Fan Power Controller Module）
一、产品概述
FPC-T0097A-11 是一款专用于 Tokyo Electron 半导体设备中的风扇控制模块，用于管理、调节与监控设备内冷却风扇的运行状态。该模块确保各子系统中的强制风冷单元按需运行，以维持设备在规定温度范围内工作。
二、核心功能
风扇供电与启动控制
为多个冷却风扇提供独立或集中供电控制，按设定时序或温控信号启停。
转速调节功能
支持 PWM（脉宽调制）或电压控制，实现风扇转速调节，优化散热与能耗。
风扇状态反馈
监测每个风扇的运行状态，如转速、故障、停转报警等，反馈至主控系统。
多通道风扇管理
管理多个风扇通道（如 2～8 路），适应复杂的散热结构需求。
三、典型应用设备
FPC-T0097A-11 风扇控制模块适用于以下 Tokyo Electron 设备的冷却系统：
Etcher 系列蚀刻设备
CVD / PVD 薄膜沉积系统
Coater/Developer 涂胶显影设备
真空泵站、干泵辅助冷却单元
电气控制柜、功率模块散热子系统
英文资料：
Product Name: FPC-T0097A-11 Fan Control Module
Manufacturer: Tokyo Electron Ltd
Product type: Fan Power Controller Module
1、 Product Overview
FPC-T0097A-11 is a fan control module specifically designed for Tokyo Electron semiconductor devices, used to manage, regulate, and monitor the operational status of cooling fans inside the device. This module ensures that the forced air cooling units in each subsystem operate as needed to maintain the equipment operating within the specified temperature range.
2、 Core functions
Fan power supply and start-up control
Provide independent or centralized power control for multiple cooling fans, starting and stopping according to set timing or temperature control signals.
Speed regulation function
Support PWM (Pulse Width Modulation) or voltage control to achieve fan speed regulation, optimize heat dissipation and energy consumption.
Fan status feedback
Monitor the operating status of each fan, such as speed, faults, and shutdown alarms, and provide feedback to the main control system.
Multi channel fan management
Manage multiple fan channels (such as 2-8 channels) to adapt to complex cooling structure requirements.
3、 Typical application devices
The FPC-T0097A-11 fan control module is suitable for the cooling system of the following Tokyo Electron devices:
Etcher series etching equipment
CVD/PVD thin film deposition system
Coater/Developer coating and developing equipment
Vacuum pump station, dry pump auxiliary cooling unit
Electrical control cabinet, power module cooling subsystem
2.产 品 展 示
3.其他产品
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