Tokyo Electron 1381-648642-15控制主板卡件 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称:1381-648642-15 控制主板卡件
制造商:Tokyo Electron Ltd.(东京电子)
产品类型:控制主板卡件(Main Control Board Module)
一、产品概述
1381-648642-15 是 Tokyo Electron 半导体设备中重要的控制主板卡件,主要承担设备核心控制功能,协调设备运行的各个子系统,实现自动化控制与数据处理。
二、主要功能
集成微控制器或处理器,运行设备控制程序
管理输入输出信号,完成传感器数据采集及执行器控制
支持与上位控制系统的通信,实现工艺参数配置与状态监控
具备故障检测与报警功能,提高设备可靠性
三、典型应用
广泛应用于 Tokyo Electron 的各类半导体制造设备,包括但不限于:
蚀刻设备(Etcher)
薄膜沉积设备(CVD、PVD)
涂胶显影设备(Coater/Developer)
晶圆处理及传送系统
英文资料:
Product Name: 1381-648642-15 Control Motherboard Card
Manufacturer: Tokyo Electron Ltd
Product type: Main Control Board Module
1、 Product Overview
1381-648642-15 is an important control motherboard card in Tokyo Electron semiconductor equipment, mainly responsible for the core control functions of the equipment, coordinating various subsystems of equipment operation, and achieving automation control and data processing.
2、 Main functions
Integrated microcontroller or processor, running device control programs
Manage input and output signals, complete sensor data acquisition and actuator control
Support communication with the upper control system to achieve process parameter configuration and status monitoring
Equipped with fault detection and alarm functions to improve equipment reliability
3、 Typical applications
Widely used in various semiconductor manufacturing equipment of Tokyo Electron, including but not limited to:
Etcher equipment
Thin film deposition equipment (CVD, PVD)
Coater/Developer
Wafer processing and transportation system
2.产 品 展 示
3.其他产品
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